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Reflective mask technologies and imaging results in soft x‐ray projection lithography
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10.1116/1.585312
/content/avs/journal/jvstb/9/6/10.1116/1.585312
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/9/6/10.1116/1.585312
/content/avs/journal/jvstb/9/6/10.1116/1.585312
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/content/avs/journal/jvstb/9/6/10.1116/1.585312
1991-11-01
2014-09-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reflective mask technologies and imaging results in soft x‐ray projection lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/9/6/10.1116/1.585312
10.1116/1.585312
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