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Soft x‐ray projection lithography using a 1:1 ring field optical system
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10.1116/1.585315
/content/avs/journal/jvstb/9/6/10.1116/1.585315
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/9/6/10.1116/1.585315
/content/avs/journal/jvstb/9/6/10.1116/1.585315
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/content/avs/journal/jvstb/9/6/10.1116/1.585315
1991-11-01
2014-07-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Soft x‐ray projection lithography using a 1:1 ring field optical system
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/9/6/10.1116/1.585315
10.1116/1.585315
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