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Volume 32, Issue 3, May 2014

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  • Nanometer Science & Technology
  • MEMS & NEMS
  • Special Issue: High-k Dielectrics
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38d913362403a4a254fa758cb6527ba5 journal.issuezxybnytfddd
Scitation: Journal of Vacuum Science & Technology B - Browse
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/32/3
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