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The Si3N4/TiN Interface: 1. TiN(001) Grown and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy
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10.1116/11.20121001
/content/avs/journal/sss/19/1/10.1116/11.20121001
http://aip.metastore.ingenta.com/content/avs/journal/sss/19/1/10.1116/11.20121001

Figures

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Accession #01240–01, 01240–06, 01240–11Host Materialepitaxial TiN(001) thin filmTechniqueXPSSpectral RegionsurveyInstrumentKratos Axis UltraExcitation SourceAl K α monochromaticSource Energy1486.6 eVSource Strength225 WSource Size2 mm × 2 mmAnalyzer Typespherical sectorIncident Anglevaries by spectrumEmission Anglevaries by spectrumAnalyzer Pass Energy:160 eVAnalyzer Resolution2.4 eVTotal Signal Accumulation Time270 sTotal Elapsed Time#01240-01: 530 s; #01240-06: 530 s; #01240-11: 480 sNumber of Scans2Effective Detector Width33.6 eVComment#01240-01: emission angle = 0°; #01240-06: emission angle = 60°; #01240-11: emission angle = 75°

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Accession #01240–02, 01240–07, 01240–12Host Materialepitaxial TiN(001) thin filmTechniqueXPSSpectral RegionO 1s InstrumentKratos Axis UltraExcitation SourceAl K α monochromaticSource Energy1486.6 eVSource Strength225 WSource Size2 mm × 2 mmAnalyzer Typespherical sectorIncident Anglevaries by spectrumEmission Anglevaries by spectrumAnalyzer Pass Energy:20 eVAnalyzer Resolution0.3 eVTotal Signal Accumulation Time#01240-02: 81 s; #01240-07: 81 s; #01240-12: 122 sTotal Elapsed Time#01240-02: 223 s; #01240-07: 223 s; #01240-12: 335 sNumber of Scans#01240-02: 10; #01240-07: 10; #01240-12: 15Effective Detector Width4.2 eVComment#01240-02: emission angle = 0°; #01240-07: emission angle = 60°; #01240-12: emission angle = 75°

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Accession #01240–03, 01240–08, 01240–13Host Materialepitaxial TiN(001) thin filmTechniqueXPSSpectral RegionTi 2p InstrumentKratos Axis UltraExcitation SourceAl K α monochromaticSource Energy1486.6 eVSource Strength225 WSource Size2 mm × 2 mmAnalyzer Typespherical sectorIncident Anglevaries by spectrumEmission Anglevaries by spectrumAnalyzer Pass Energy:20 eVAnalyzer Resolution0.3 eVTotal Signal Accumulation Time#01240-03: 201 s; #01240-08: 201 s; #01240-13: 302 sTotal Elapsed Time#01240-03: 555 s; #01240-08: 555 s; #01240-13: 832 sNumber of Scans#01240-03: 10; #01240-08: 10; #01240-13: 15Effective Detector Width4.2 eVComment#01240-03: emission angle = 0°; #01240-08: emission angle = 60°; #01240-13: emission angle = 75°

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Accession #01240–04, 01240–09, 01240–14Host Materialepitaxial TiN(001) thin filmTechniqueXPSSpectral RegionN 1s InstrumentKratos Axis UltraExcitation SourceAl K α monochromaticSource Energy1486.6 eVSource Strength225 WSource Size2 mm × 2 mmAnalyzer Typespherical sectorIncident Anglevaries by spectrumEmission Anglevaries by spectrumAnalyzer Pass Energy:20 eVAnalyzer Resolution0.3 eVTotal Signal Accumulation Time#01240-04: 161 s; #01240-09: 161 s; #01240-14: 242 sTotal Elapsed Time#01240-04: 444 s; #01240-09: 444 s; #01240-14: 666 sNumber of Scans#01240-04: 10; #01240-09: 10; #01240-14: 15Effective Detector Width4.2 eVComment#01240-04: emission angle = 0°; #01240-09: emission angle = 60°; #01240-14: emission angle = 75°

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Accession #01240–05, 01240–10, 01240–15Host Materialepitaxial TiN(001) thin filmTechniqueXPSSpectral Regionvalence bandInstrumentKratos Axis UltraExcitation SourceAl K α monochromaticSource Energy1486.6 eVSource Strength225 WSource Size2 mm × 2 mmAnalyzer Typespherical sectorIncident Anglevaries by spectrumEmission Anglevaries by spectrumAnalyzer Pass Energy:20 eVAnalyzer Resolution0.3 eVTotal Signal Accumulation Time#01240-05: 181 s; #01240-10: 181 s; #01240-15: 272 sTotal Elapsed Time#01240-05: 499 s; #01240-10: 499 s; #01240-15: 749 sNumber of Scans#01240-05: 10; #01240-10: 10; #01240-15: 15Effective Detector Width4.2 eVComment#01240-05: emission angle = 0°; #01240-10: emission angle = 60°; #01240-15: emission angle = 75°

Tables

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SPECTRAL FEATURES TABLE

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GUIDE TO FIGURES

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/content/avs/journal/sss/19/1/10.1116/11.20121001
2012-12-19
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The Si3N4/TiN Interface: 1. TiN(001) Grown and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy
http://aip.metastore.ingenta.com/content/avs/journal/sss/19/1/10.1116/11.20121001
10.1116/11.20121001
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