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Theoretical and Applied Mechanics Letters
A novel inductive technique for microcantilever displacement detection
Scheme of an inductive cantilever (a) before and (b) after bending.
Various inductive cantilever metal line designs.
Circuit design layout for the ANSOFT simulation.
The voltage difference (ΔV, in the unit of mV) and sensitivity (ΔV/V) of designs (a, b, c) vs. frequency. ΔV is the difference between the induced voltage before and after cantilever bending. V is the initial voltage that is induced before bending.
Magnetic field offset observed in designs (a) and (b) causes negative inductance effect.
ΔV/V (a) and inductance change (b) as a function of cantilever deflection.
ΔV and ΔV/V of the cantilever with respect to (a) width and (b) thickness of the metal lines.
(a) Physical structure and (b) lumped model of inductive cantilevers considered for mathematical model.
(a) Equivalent circuit(PSPICE model)for the designed inductive cantilever sensor. (b) Δ V versus frequency as determined by models used in PSPICE and ANSOFT
Parameters considered for the mathematical model
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