Full text loading...
Theoretical and Applied Mechanics Letters
Characterization of the arrangement feature of copper interconnects by Moiré inversion method
Formation of the Moiré fringes, where , and m are the orders of the specimen grating, the reference grating and the Moiré fringes, respectively; , and are the spacings of the specimen grating, the reference grating and the Moiré fringes, respectively; ϕ is the included angle between the directions of the Moiré fringes and the reference grating lines.
Structure of the copper interconnects sample, where the light part are the copper interconnects.
(a) The FIB Moiré formed by the FIB scanning lines and the copper interconnects, (b) thin Moiré fringes after (a) is processed.
Thin Moiré fringes on the surface of the copper interconnects in a Cartesian coordinate system, where m is the Moiré fringe order, black lines are the thin Moiré fringes, and red lines are the fitted curves.
Article metrics loading...