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Theoretical and Applied Mechanics Letters

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Characterization of the arrangement feature of copper interconnects by Moiré inversion method
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10.1063/2.1202108
/content/cstam/journal/taml/2/2/10.1063/2.1202108
http://aip.metastore.ingenta.com/content/cstam/journal/taml/2/2/10.1063/2.1202108
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Figures

Image of Fig. 1.
Fig. 1.

Formation of the Moiré fringes, where , and m are the orders of the specimen grating, the reference grating and the Moiré fringes, respectively; , and are the spacings of the specimen grating, the reference grating and the Moiré fringes, respectively; ϕ is the included angle between the directions of the Moiré fringes and the reference grating lines.

Image of Fig. 2.
Fig. 2.

Structure of the copper interconnects sample, where the light part are the copper interconnects.

Image of Fig. 3.
Fig. 3.

(a) The FIB Moiré formed by the FIB scanning lines and the copper interconnects, (b) thin Moiré fringes after (a) is processed.

Image of Fig. 4.
Fig. 4.

Thin Moiré fringes on the surface of the copper interconnects in a Cartesian coordinate system, where m is the Moiré fringe order, black lines are the thin Moiré fringes, and red lines are the fitted curves.

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/content/cstam/journal/taml/2/2/10.1063/2.1202108
2012-03-10
2014-04-18
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Scitation: Characterization of the arrangement feature of copper interconnects by Moiré inversion method
http://aip.metastore.ingenta.com/content/cstam/journal/taml/2/2/10.1063/2.1202108
10.1063/2.1202108
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