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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures -- November 2009
Volume 27, Issue 6,
partial issue
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Letters
Proton irradiation effects on Sb-based heterojunction bipolar transistors
C. F. Lo
,
H.-Y. Kim
,
J. Kim
,
Shu-Han Chen
,
Sheng-Yu Wang
,
Jen-Inn Chyi
,
B. Y. Chou
,
K. H. Chen
,
Y. L. Wang
,
C. Y. Chang
,
S. J. Pearton
,
L. I. Kravchenko
,
S. Jang
, and
F. Ren
pp. L33-L37
Abstract
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(598 kB) ]
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Resonant structures based on amorphous silicon suboxide doped with Er
3+
with silicon nanoclusters for an efficient emission at 1550 nm
D. S. L. Figueira
,
D. Mustafa
,
L. R. Tessler
, and
N. C. Frateschi
pp. L38-L41
Abstract
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(435 kB) ]
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190 nm excimer laser drilling of glass slices: Dependence of drilling rate and via hole shape on the diameter of the via hole
K. H. Chen
,
Wenhsing Wu
,
Byung Hwan Chu
,
C. F. Lo
,
Jenshan Lin
,
Y. L. Wang
,
C. Y. Chang
,
S. J. Pearton
, and
F. Ren
pp. L42-L46
Abstract
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(668 kB) ]
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Alloy liquid metal ion source for carbon focused ion beams
P. Mazarov
,
A. D. Wieck
,
L. Bischoff
, and
W. Pilz
pp. L47-L49
Abstract
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(259 kB) ]
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Selective etching and polymer deposition on InP surface in reactive ion etching with a mixture of methane and hydrogen
Norio Yamamoto
pp. L50-L53
Abstract
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(232 kB) ]
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Regular Articles
Investigation of the physical and electronic properties of indium doped zinc oxide nanofibers synthesized by electrospinning
A. F. Lotus
,
Y. C. Kang
,
R. D. Ramsier
, and
G. G. Chase
pp. 2331-2336
Abstract
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(819 kB) ]
Order
Removing plasma-induced sidewall damage in GaN-based light-emitting diodes by annealing and wet chemical treatments
Y. Yang
and
X. A. Cao
pp. 2337-2341
Abstract
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(747 kB) ]
Order
Damage evolution in GaN under MeV heavy ion implantation
Yuan Gao
,
Jianming Xue
,
Dongzheng Zhang
,
Zilong Wang
,
Chune Lan
,
Sha Yan
,
Yugang Wang
,
Fujun Xu
,
Bo Shen
, and
Yanwen Zhang
pp. 2342-2346
Abstract
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(696 kB) ]
Order
Focused-ion beam fabrication of nanometer orifices for leak detection
G. Firpo
,
L. Repetto
,
F. Buatier de Mongeot
, and
U. Valbusa
pp. 2347-2350
Abstract
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(527 kB) ]
Order
HBr based inductively coupled plasma etching of high aspect ratio nanoscale trenches in InP: Considerations for photonic applications
N. Sultana
,
Wei Zhou
,
Tim P. LaFave, Jr.
, and
Duncan L. MacFarlane
pp. 2351-2356
Abstract
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(792 kB) ]
Order
Measuring interface electrostatic potential and surface charge in a scanning electron microscope
I. Sychugov
,
Y. Nakayama
, and
K. Mitsuishi
pp. 2357-2360
Abstract
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(560 kB) ]
Order
Selective dry etching of attenuated phase-shift mask materials for extreme ultraviolet lithography using inductively coupled plasmas
H. Y. Jung
,
Y. R. Park
,
H. J. Lee
,
N.-E. Lee
,
C. Y. Jeong
, and
Jinho Ahn
pp. 2361-2365
Abstract
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(417 kB) ]
Order
Electrical characteristics of thin boron carbonitride films on Ge(100) and Si(100)
P. R. Fitzpatrick
and
J. G. Ekerdt
pp. 2366-2374
Abstract
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(501 kB) ]
Order
Study of low temperature growth of III-V alloys for transparent layers
L. Wu
,
S. Iyer
,
J. Li
,
K. Gibson
,
J. Reppert
,
A. M. Rao
,
K. Matney
, and
J. Lewis
pp. 2375-2383
Abstract
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(969 kB) ]
Order
Influence of sputtering a ZnMgO window layer on the interface and bulk properties of Cu(In,Ga)Se
2
solar cells
Jian V. Li
,
Xiaonan Li
,
Yanfa Yan
,
Chun-Sheng Jiang
,
Wyatt K. Metzger
,
Ingrid L. Repins
,
Miguel A. Contreras
, and
Dean H. Levi
pp. 2384-2389
Abstract
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(326 kB) ]
Order
Physical and electrical characterizations of metal-oxide-semiconductor capacitors fabricated on GaAs substrates with different surface chemical treatments and Al
2
O
3
gate dielectric
Domingo I. Garcia-Gutierrez
,
Davood Shahrjerdi
,
Vidya Kaushik
, and
Sanjay K. Banerjee
pp. 2390-2395
Abstract
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(554 kB) ]
Order
Influence of proton irradiation on the structure and stability of poly(dimethylsiloxane) and poly(dimethylsiloxane)-nanodiamond composite
V. Borjanović
,
L. Bistričić
,
I. Vlasov
,
K. Furić
,
I. Zamboni
,
M. Jakšić
, and
O. Shenderova
pp. 2396-2403
Abstract
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(604 kB) ]
Order
Transport mechanism in aluminum nitride-metal multilayer junctions
A. Kabulski
and
D. Korakakis
pp. 2404-2407
Abstract
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(312 kB) ]
Order
Simultaneous measurement of thermal conductivity and interface thermal conductance of diamond thin film
Byeonghee Lee
,
Joon Sik Lee
,
Sun Ung Kim
,
Kyeongtae Kim
,
Ohmyoung Kwon
,
Seungkoo Lee
,
Jong Hoon Kim
, and
Dae Soon Lim
pp. 2408-2412
Abstract
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(356 kB) ]
Order
Hyperthermal atomic hydrogen and oxygen etching of vertically oriented graphene sheets
M. Bagge-Hansen
,
R. A. Outlaw
,
M. Y. Zhu
,
H. J. Chen
, and
D. M. Manos
pp. 2413-2419
Abstract
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(561 kB) ]
Order
Improving field-emission uniformity of large-area W
18
O
49
nanowire films by electrical treatment
Z. L. Li
,
Fei Liu
,
N. S. Xu
,
Jun Chen
, and
S. Z. Deng
pp. 2420-2425
Abstract
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(825 kB) ]
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Concept and operation of Schottky emitter without suppressor electrode
A. K. Dokania
and
P. Kruit
pp. 2426-2431
Abstract
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(493 kB) ]
Order
Thermodynamically stable nanotips of Au–Mo alloy
K. Nomura
,
T. Nagao
,
B. L. Cho
,
H. Katsuda
,
T. Matsumura
, and
C. Oshima
pp. 2432-2434
Abstract
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(238 kB) ]
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Emission site density depending on surface area and morphology of nanotube film emitters
Huarong Liu
,
Shigeki Kato
, and
Yahachi Saito
pp. 2435-2438
Abstract
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(355 kB) ]
Order
Protein patterning on the micro- and nanoscale by thermal nanoimprint lithography on a new functionalized copolymer
S. Merino
,
A. Retolaza
,
V. Trabadelo
,
A. Cruz
,
P. Heredia
,
J. A. Alduncín
,
D. Mecerreyes
,
I. Fernández-Cuesta
,
X. Borrisé
, and
F. Pérez-Murano
pp. 2439-2443
Abstract
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(609 kB) ]
Order
Carbon nanotube pillar structures for human neural cell culture
Jin Woo Lee
,
Kyong Soo Lee
,
Byeong Kwon Ju
,
Hyun Jin Cho
,
Nae Sung Lee
,
Min Young Kim
,
Eun Hye Kim
, and
Kyu Back Lee
pp. 2444-2448
Abstract
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(1593 kB) ]
Order
Fabrication of large-area gallium arsenide nanowires using silicon dioxide nanoparticle mask
Ding-Shin Wang
,
Jiun-Jie Chao
,
Shih-Che Hung
, and
Ching-Fuh Lin
pp. 2449-2452
Abstract
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(525 kB) ]
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