Top 20 Most Downloaded Articles

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films -- October 2009

The 20 research articles with the most full-text downloads during the month, in descending order

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Resistor network simulation method for a vacuum system in a molecular flow region
Susumu Ohta, Nagamitsu Yoshimura, and Haruo Hirano
J. Vac. Sci. Technol. A 1, 84 (1983) (6 pages)
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Metal–organic interface and charge injection in organic electronic devices
J. Campbell Scott
J. Vac. Sci. Technol. A 21, 521 (2003) (11 pages)
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Effects of pulsed sputtering frequency on the uniformity of Al:ZnO's transparent conductive oxide properties for solar cell applications
Wonkyun Yang and Junghoon Joo
J. Vac. Sci. Technol. A 27, 1310 (2009) (6 pages)
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Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films
Matthew M. Hawkeye and Michael J. Brett
J. Vac. Sci. Technol. A 25, 1317 (2007) (19 pages)
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Dry etching of polydimethylsiloxane for microfluidic systems
J. Garra, T. Long, J. Currie, T. Schneider, R. White, and M. Paranjape
J. Vac. Sci. Technol. A 20, 975 (2002) (8 pages)
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Plasma deposition of optical films and coatings: A review
Ludvik Martinu and Daniel Poitras
J. Vac. Sci. Technol. A 18, 2619 (2000) (27 pages)
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Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering system
Samuel D. Ekpe, Francisco J. Jimenez, David J. Field, Martin J. Davis, and Steven K. Dew
J. Vac. Sci. Technol. A 27, 1275 (2009) (6 pages)
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Work function determination of zinc oxide films
K. B. Sundaram and Ashamin Khan
J. Vac. Sci. Technol. A 15, 428 (1997) (3 pages)
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Analysis of controlled mixed-phase (amorphous+microcrystalline) silicon thin films by real time spectroscopic ellipsometry
N. J. Podraza, Jing Li, C. R. Wronski, E. C. Dickey, and R. W. Collins
J. Vac. Sci. Technol. A 27, 1255 (2009) (5 pages)
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Mechanisms for plasma etching of HfO2 gate stacks with Si selectivity and photoresist trimming
Juline Shoeb and Mark J. Kushner
J. Vac. Sci. Technol. A 27, 1289 (2009) (14 pages)
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Sputter deposition of Al-doped ZnO films with various incident angles
Yasushi Sato, Kei Yanagisawa, Nobuto Oka, Shin-ichi Nakamura, and Yuzo Shigesato
J. Vac. Sci. Technol. A 27, 1166 (2009) (6 pages)
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Mechanics of stretchable inorganic electronic materials
J. Song, H. Jiang, Y. Huang, and J. A. Rogers
J. Vac. Sci. Technol. A 27, 1107 (2009) (19 pages)
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Correlation of outgassing of stainless steel and aluminum with various surface treatments
H. F. Dylla, D. M. Manos, and P. H. LaMarche
J. Vac. Sci. Technol. A 11, 2623 (1993) (14 pages)
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Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces
John C. Hulteen and Richard P. Van Duyne
J. Vac. Sci. Technol. A 13, 1553 (1995) (6 pages)
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Interface-mediated ultrafast carrier conduction in oxide thin films and superlattices for energy
Shriram Ramanathan
J. Vac. Sci. Technol. A 27, 1126 (2009) (9 pages)
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Microstructural evolution during film growth
I. Petrov, P. B. Barna, L. Hultman, and J. E. Greene
J. Vac. Sci. Technol. A 21, S117 (2003) (12 pages)
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Characterizations of Ga-doped ZnO films on Si (111) prepared by atmospheric pressure metal-organic chemical vapor deposition
Yen-Chin Huang, Zhen-Yu Li, Li-Wei Weng, Wu-Yih Uen, Shan-Ming Lan, Sen-Mao Liao, Tai-Yuan Lin, Yu-Hsiang Huang, Jian-Wen Chen, Tsun-Neng Yang, and Chin-Chen Chiang
J. Vac. Sci. Technol. A 27, 1260 (2009) (6 pages)
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Modeling of the angular dependence of plasma etching
Wei Guo and Herbert H. Sawin
J. Vac. Sci. Technol. A 27, 1326 (2009) (11 pages)
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Surface patterns from block copolymer self-assembly
Ho-Cheol Kim and William D. Hinsberg
J. Vac. Sci. Technol. A 26, 1369 (2008) (14 pages)
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Measurement of electron temperatures and electron energy distribution functions in dual frequency capacitively coupled CF4/O2 plasmas using trace rare gases optical emission spectroscopy
Zhiying Chen, Vincent M. Donnelly, Demetre J. Economou, Lee Chen, Merritt Funk, and Radha Sundararajan
J. Vac. Sci. Technol. A 27, 1159 (2009) (7 pages)
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