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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures -- October 2009

The 20 research articles with the most full-text downloads during the month, in descending order

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Postfabrication resistance trimming of a superconducting tunnel junction using a focused ion beam
Z. H. Barber, M. G. Blamire, and N. J. Dawes
J. Vac. Sci. Technol. B 13, 318 (1995) (3 pages)
Abstract Full Text: [    PDF (371 kB)  ] Order

Nanoimprint lithography: An old story in modern times? A review
Helmut Schift
J. Vac. Sci. Technol. B 26, 458 (2008) (23 pages)
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Band offsets of wide-band-gap oxides and implications for future electronic devices
John Robertson
J. Vac. Sci. Technol. B 18, 1785 (2000) (7 pages)
Abstract Full Text: [    PDF (86 kB)  ] Order

GaN, AlN, and InN: A review
S. Strite and H. Morkoç
J. Vac. Sci. Technol. B 10, 1237 (1992) (30 pages)
Abstract Full Text: [    PDF (3643 kB)  ] Order

Recent advances in processing of ZnO
S. J. Pearton, D. P. Norton, K. Ip, Y. W. Heo, and T. Steiner
J. Vac. Sci. Technol. B 22, 932 (2004) (17 pages)
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Effects of Si interlayer on resistance switching of Pt/Si/TiO₂/Pt structures
Seunghee Go, Kyunghoon Jeong, Kwanwoo Lee, Ara Kim, Hyun Ruh, Chang Soo Kim, and Jaegab Lee
J. Vac. Sci. Technol. B 27, 2175 (2009) (7 pages)
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Nanofabrication by scanning probe microscope lithography: A review
Ampere A. Tseng, Andrea Notargiacomo, and T. P. Chen
J. Vac. Sci. Technol. B 23, 877 (2005) (18 pages)
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Effect of sidewall passivation in BCl₃/N₂ inductively coupled plasma etching of two-dimensional GaAs photonic crystals
Kirill A. Atlasov, Pascal Gallo, Alok Rudra, Benjamin Dwir, and Eli Kapon
J. Vac. Sci. Technol. B 27, L21 (2009) (4 pages)
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Surface plasmon resonance of gold nanoparticles formed by cathodic arc plasma ion implantation into polymer
F. S. Teixeira, M. C. Salvadori, Mauro Cattani, S. M. Carneiro, and I. G. Brown
J. Vac. Sci. Technol. B 27, 2242 (2009) (6 pages)
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UV nanoimprint materials: Surface energies, residual layers, and imprint quality
H. Schmitt, L. Frey, H. Ryssel, M. Rommel, and C. Lehrer
J. Vac. Sci. Technol. B 25, 785 (2007) (6 pages)
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Structural and electrical properties of metal contacts on n-type ZnO thin film deposited by vacuum coating technique
C. Periasamy and P. Chakrabarti
J. Vac. Sci. Technol. B 27, 2124 (2009) (4 pages)
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Influence of room temperature control on atomic force microscope imaging
Joseph Fu, Chu Wei, and Theodore Vorburger
J. Vac. Sci. Technol. B 27, 2321 (2009) (3 pages)
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Imprinted large-scale high density polymer nanopillars for organic solar cells
Mukti Aryal, Fatih Buyukserin, Kamil Mielczarek, Xiao-Mei Zhao, Jinming Gao, Anvar Zakhidov, and Wenchuang (Walter) Hu
J. Vac. Sci. Technol. B 26, 2562 (2008) (5 pages)
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Impact of in situ SiN_x layer grown with metal organic vapor phase epitaxy on the electrical and optical properties of AlN/GaN metal insulator semiconductor field effect transistor structures
E. Cho, S. Seo, C. Jin, D. Pavlidis, G. Fu, J. Tuerck, and W. Jaegermann
J. Vac. Sci. Technol. B 27, 2079 (2009) (5 pages)
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Luminescence mechanisms in Si quantum dots-SiN_x nanocomposite structures
Béchir Rezgui, Abel Sibai, Tetyana Nychyporuk, Mustapha Lemiti, and Georges Brémond
J. Vac. Sci. Technol. B 27, 2238 (2009) (4 pages)
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Growth scaling of metal oxide columnar thin films deposited by glancing angle depositions
M. T. Taschuk, K. M. Krause, J. J. Steele, M. A. Summers, and M. J. Brett
J. Vac. Sci. Technol. B 27, 2106 (2009) (6 pages)
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Gas-assisted focused electron beam and ion beam processing and fabrication
Ivo Utke, Patrik Hoffmann, and John Melngailis
J. Vac. Sci. Technol. B 26, 1197 (2008) (80 pages)
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Transparent dual-gate InGaZnO thin film transistors: OR gate operation
Wantae Lim, E. A. Douglas, Jaewon Lee, Junghun Jang, V. Craciun, D. P. Norton, S. J. Pearton, F. Ren, S. Y. Son, J. H. Yuh, H. Shen, and W. Chang
J. Vac. Sci. Technol. B 27, 2128 (2009) (4 pages)
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Sub-10 nm imprint lithography and applications
Stephen Y. Chou, Peter R. Krauss, Wei Zhang, Lingjie Guo, and Lei Zhuang
J. Vac. Sci. Technol. B 15, 2897 (1997) (8 pages)
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Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing
H. Kim
J. Vac. Sci. Technol. B 21, 2231 (2003) (31 pages)
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