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Directed assembly of Ge islands grown on Au-patterned Si(100)

AIP Conf. Proc. -- June 30, 2005 -- Volume 772, pp. 609-610
PHYSICS OF SEMICONDUCTORS: 27th International Conference on the Physics of Semiconductors - ICPS-27; doi:10.1063/1.1994254

Issue Date: 30 June 2005

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J. T. Robinson,1,2 J. A. Liddle,2 A. Minor,2 V. Radmilovic,2 and O. D. Dubon1,2
1Department of Materials and Engineering, University of California, Berkeley, CA 94720
2Lawrence Berkeley National Laboratory, Berkeley, CA 94720

We have achieved two-dimensional alignment of Ge islands grown by molecular beam epitaxy on Au-patterned Si(100). Arrays of Au dots are patterned by electron-beam evaporation of 1 nm of Au through a stencil mask. For a square array of Au dots, a two-dimensional square lattice consisting of Ge islands less than 100 nm in height extending over hundreds of micrometers has been realized. Surprisingly, the Ge islands are square-based, {111}-side- and (100)-top-faceted truncated pyramids and grow at the centers of the squares formed by the Au-dot arrays. This novel growth process is a versatile method to manipulate island growth kinetics and thereby direct their assembly over large areas. ©2005 American Institute of Physics
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KEYWORDS and PACS

Keywords
PACS
  • 81.07.Ta
    Quantum dots: fabrication and characterization
  • 81.16.Rf
    Nanoscale pattern formation in nanofabrication and processing
  • YEAR: 2005

PUBLICATION DATA

ISSN:
0094-243X (print)  
Publisher:
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