Directed assembly of Ge islands grown on Au-patterned Si(100)
AIP Conf. Proc. -- June 30, 2005 -- Volume 772, pp. 609-610
PHYSICS OF SEMICONDUCTORS: 27th International Conference on the Physics of Semiconductors - ICPS-27;
doi:10.1063/1.1994254
Issue Date: 30 June 2005
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We have achieved two-dimensional alignment of Ge islands grown by molecular beam epitaxy on Au-patterned Si(100). Arrays of Au dots are patterned by electron-beam evaporation of 1 nm of Au through a stencil mask. For a square array of Au dots, a two-dimensional square lattice consisting of Ge islands less than 100 nm in height extending over hundreds of micrometers has been realized. Surprisingly, the Ge islands are square-based, {111}-side- and (100)-top-faceted truncated pyramids and grow at the centers of the squares formed by the Au-dot arrays. This novel growth process is a versatile method to manipulate island growth kinetics and thereby direct their assembly over large areas. ©2005 American Institute of Physics
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PUBLICATION DATA
0094-243X (print)
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