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Simultaneous measurement of lateral and normal forces with an optical-beam-deflection atomic force microscope

Appl. Phys. Lett. 57, 2089 (1990); doi:10.1063/1.103950

Issue Date: 12 November 1990

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Gerhard Meyer and Nabil M. Amer
IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598
An atomic force microscope capable of measuring, simultaneously yet separately, lateral (``frictional'') and normal forces is described. A direction-dependent feature, absent in topological images, is found when scanning stepped surfaces of NaCl (001) in ultrahigh vacuum. A simple model is presented to account for this observation. Applied Physics Letters is copyrighted by The American Institute of Physics.
History: Received 16 July 1990; accepted 20 August 1990
Permalink: http://link.aip.org/link/?APPLAB/57/2089/1
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KEYWORDS and PACS

Keywords
PACS
  • 46.30.Rc
    Classical mechanics and rheology Mechanics and rheology (including stability and structural mechanics of shells, plates, and beams) Measurement methods and techniques
  • 68.35.Bs
    Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Solid surfaces and solidsolid interfaces (including bicrystals) Geometry; atomic and molecular orientation; crystal shapes; surface topography
  • 06.70.-h
    Measurement science, general laboratory techniques, and instrumentation systems General instrumentation
  • 81.40.Pq
    Materials science Treatment of materials and its effects on microstructure and properties Friction, lubrication, and wear
  • YEAR: 1990

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (8)

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  1. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
  2. G. Meyer and N. M. Amer, Appl. Phys. Lett. 56, 2100 (1990).
  3. In addition, lateral bending of the cantilever, in the x-y plane, may occur. However, when currently available microfabricated cantilevers are used, no orientational change in the direction of the reflected laser beam is to be expected. Nevertheless, with the proper cantilever design, lateral bending can be detected with the optical beam deflection approach.
  4. Silicon Detector Corp., Newbury Park, CA 91320.
  5. H. Bethge and K. W. Keller, J. Cryst. Growth 23, 105 (1974), and references therein.
  6. U. Landman, W. D. Luedtke, and M. W. Ribarsky, J. Vac. Sci. Technol. A 7, 2829 (1989).
  7. The absolute values of the measured forces depend critically on the tip length. Since the exact tip length was not measured after scanning, the values reported here have an estimated uncertainty of a factor of 2.
  8. J. B. Pethica and W. C. Oliver, Physica Scripta. T 19, 61 (1987).

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