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In situ electron-spin-resonance measurements of film growth of hydrogenated amorphous silicon

Appl. Phys. Lett. 70, 1137 (1997); doi:10.1063/1.119073

Issue Date: 3 March 1997

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Satoshi Yamasaki, Takahide Umeda, Junichi Isoya, and Kazunobu Tanaka
Joint Research Center for Atom Technology (JRCAT), National Institute for Advanced Interdisciplinary Research (NAIR), 1-1-4, Higashi, Tsukuba, Ibaraki 305, Japan
In situ electron-spin-resonance (ESR) measurements of film growth of hydrogenated amorphous silicon (a-Si:H) using a remote hydrogen plasma technique have been performed. The Si dangling-bond signal in a-Si:H during and after deposition has been detected, in addition to the gas-phase ESR signals both of atomic hydrogen and radicals related with silane molecules. Dynamic changes of the Si dangling-bond signal intensity have been observed in real-time, where the signal intensity increases with deposition time and decreases after stopping the deposition due to a structural relaxation. High potentiality of in situ ESR techniques for microscopic understanding of film growth and surface reaction has been demonstrated. ©1997 American Institute of Physics.
History: Received 28 October 1996; accepted 2 January 1997
Permalink: http://link.aip.org/link/?APPLAB/70/1137/1
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KEYWORDS and PACS

Keywords
PACS
  • 81.15.Gh
    Materials science Methods of deposition of films and coatings; film growth and epitaxy Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)
  • 81.05.Cy
    Materials science Specific materials: fabrication, treatment, testing, and analysis Elemental semiconductors
  • 76.30.Mi
    Magnetic resonances and relaxation in condensed matter, ossbauer effect Electron paramagnetic resonance and relaxation Color centers and other defects
  • 76.30.Rn
    Magnetic resonances and relaxation in condensed matter, ossbauer effect Electron paramagnetic resonance and relaxation Free radicals
  • 81.05.Gc
    Materials science Specific materials: fabrication, treatment, testing, and analysis Amorphous semiconductors
  • YEAR: 1996-97

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (11)

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