In situ electron-spin-resonance measurements of film growth of hydrogenated amorphous silicon
Appl. Phys. Lett. 70, 1137 (1997); doi:10.1063/1.119073
Issue Date: 3 March 1997
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In situ electron-spin-resonance (ESR) measurements of film growth of hydrogenated amorphous silicon (a-Si:H) using a remote hydrogen plasma technique have been performed. The Si dangling-bond signal in a-Si:H during and after deposition has been detected, in addition to the gas-phase ESR signals both of atomic hydrogen and radicals related with silane molecules. Dynamic changes of the Si dangling-bond signal intensity have been observed in real-time, where the signal intensity increases with deposition time and decreases after stopping the deposition due to a structural relaxation. High potentiality of in situ ESR techniques for microscopic understanding of film growth and surface reaction has been demonstrated. ©1997 American Institute of Physics.
| History: | Received 28 October 1996; accepted 2 January 1997 |
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http://link.aip.org/link/?APPLAB/70/1137/1 |
KEYWORDS and PACS
silicon,
elemental semiconductors,
amorphous semiconductors,
hydrogen,
semiconductor thin films,
paramagnetic resonance,
dangling bonds,
semiconductor growth,
free radicals,
noncrystalline structure,
plasma CVD
- 81.15.Gh
Materials science Methods of deposition of films and coatings; film growth and epitaxy Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.) - 81.05.Cy
Materials science Specific materials: fabrication, treatment, testing, and analysis Elemental semiconductors - 76.30.Mi
Magnetic resonances and relaxation in condensed matter,ossbauer effect Electron paramagnetic resonance and relaxation Color centers and other defects
- 76.30.Rn
Magnetic resonances and relaxation in condensed matter,ossbauer effect Electron paramagnetic resonance and relaxation Free radicals
- 81.05.Gc
Materials science Specific materials: fabrication, treatment, testing, and analysis Amorphous semiconductors - YEAR: 1996-97
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PUBLICATION DATA
0003-6951 (print)
1077-3118 (online)
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