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Two-photon optical beam induced current imaging through the backside of integrated circuits

Appl. Phys. Lett. 71, 2578 (1997); doi:10.1063/1.119334

Issue Date: 3 November 1997

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Chris Xu and Winfried Denk
Bell Laboratories, Lucent Technologies, Murray Hill, New Jersey 07974
Two-photon optical beam induced current (TOBIC) images were acquired through the polished backsides of integrated circuits. An excitation beam with a photon energy below the band gap can traverse even thick substrates virtually unattenuated. At the focus—and only there—two-photon absorption generates electron-hole pairs very efficiently when using a sub-picosecond light source. An additional advantage of TOBIC is a significant increase in spatial resolution. With high numerical aperture objective lense features smaller than 1 µm are easily discernible. ©1997 American Institute of Physics.
History: Received 16 July 1997; accepted 4 September 1997
Permalink: http://link.aip.org/link/?APPLAB/71/2578/1
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KEYWORDS and PACS

Keywords
PACS
  • 85.40.-e
    Electronic and magnetic devices; microelectronics Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology
  • 72.40.+w
    Electronic transport in condensed matter Photoconduction and photovoltaic effects
  • YEAR: 1996-97

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ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (11)
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