Magnetoresistance of ferromagnetic tunnel junctions with Al2O3 barriers formed by rf sputter etching in Ar/O2 plasma
Appl. Phys. Lett. 73, 698 (1998); doi:10.1063/1.121952
Issue Date: 3 August 1998
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Co/Al2O3/Ni80Fe20 tunnel junctions were grown by sputtering at room temperature on glass and Si substrates, the barrier being formed by rf sputter etching of aluminum in a Ar/O2 plasma. The resistance is controlled for a given junction area by adjusting the oxide barrier thickness. Magnetoresistance ratios of 16% at 4.2 K and 6% at room temperature are obtained with good reproducibility over three orders of magnitude of resistance. Effects related to substrate shunting and oxidation of the bottom Co electrode are discussed. ©1998 American Institute of Physics.
| History: | Received 20 March 1998; accepted 2 June 1998 |
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http://link.aip.org/link/?APPLAB/73/698/1 |
KEYWORDS and PACS
cobalt,
alumina,
nickel alloys,
iron alloys,
magnetoresistance,
sputter etching,
sputtered coatings,
diffusion barriers,
ferromagnetic materials
- 73.50.Jt
Electronic structure and electrical properties of surfaces, interfaces, and thin films Electronic transport phenomena in thin films Galvanomagnetic and other magnetotransport effects (including thermomagnetic effects) - 68.35.Fx
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Solid surfaces and solid
solid interfaces
Diffusion; interface formation
- 52.75.Rx
Physics of plasmas and electric discharges Plasma devices and applications Plasma applications in manufacturing and materials processing (etching, surface cleaning, spraying, arc welding, ion implantation, film deposition, etc.) - 81.15.Cd
Materials science Methods of deposition of films and coatings; film growth and epitaxy Deposition by sputtering - 73.40.Ns
Electronic structure and electrical properties of surfaces, interfaces, and thin films Electronic transport in interface structures Metal
nonmetal contacts
- 75.50.Bb
Magnetic properties and materials Studies of specific magnetic materials Fe and its alloys - 75.50.Cc
Magnetic properties and materials Studies of specific magnetic materials Other ferromagnetic metals and alloys - YEAR: 1998
RELATED DATABASES
PUBLICATION DATA
0003-6951 (print)
1077-3118 (online)
REFERENCES (8)
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