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A low-loss composition region identified from a thin-film composition spread of (Ba1 – x – ySrxCay)TiO3

Appl. Phys. Lett. 74, 1165 (1999); doi:10.1063/1.123475

Issue Date: 22 February 1999

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H. Chang, I. Takeuchi, and X.-D. Xiang
Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720
We have generated the thin-film ternary composition spread of (Ba1 – x – ySrxCay)TiO3 on an equilateral-triangle-shaped LaAlO3 substrate. Compositional variation within the triangle was achieved by a precisely controlled shutter system inside a pulsed laser deposition chamber, which allows the deposition of precursors with gradient thickness over the length of the substrate. Appropriate postannealing afforded high-quality epitaxial thin films over almost the entire composition region. Mapping of the microwave dielectric properties of the composition-spread chip was performed using a scanning evanescent microwave microscope at 1 GHz. Composition region Ba0.12–0.25Sr0.35–0.47Ca0.32–0.53TiO3 was found to have desirable properties for electronic applications. ©1999 American Institute of Physics.
History: Received 29 October 1998; accepted 21 December 1998
Permalink: http://link.aip.org/link/?APPLAB/74/1165/1
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KEYWORDS and PACS

Keywords
PACS
  • 77.84.Dy
    Dielectrics, piezoelectrics, and ferroelectrics and their properties Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials Niobates, titanates, tantalates, PZT ceramics, etc.
  • 84.40.-x
    Electronics; radiowave and microwave technology; direct energy conversion and storage Radiowave and microwave (including millimeter wave) technology
  • 77.55.+f
    Dielectrics, piezoelectrics, and ferroelectrics and their properties Dielectric thin films
  • 68.55.Nq
    Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Composition and phase identification
  • 77.80.-e
    Dielectrics, piezoelectrics, and ferroelectrics and their properties Ferroelectricity and antiferroelectricity
  • 77.22.Ch
    Dielectrics, piezoelectrics, and ferroelectrics and their properties Dielectric properties of solids and liquids Permittivity (dielectric function)
  • 77.22.Gm
    Dielectrics, piezoelectrics, and ferroelectrics and their properties Dielectric properties of solids and liquids Dielectric loss and relaxation
  • 81.15.Fg
    Materials science Methods of deposition of films and coatings; film growth and epitaxy Laser deposition
  • 61.72.Cc
    Structure of solids and liquids; crystallography Defects and impurities in crystals; microstructure Kinetics of defect formation and annealing
  • YEAR: 1999

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ISSN:
0003-6951 (print)   1077-3118 (online)
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