Fabrication of metallic electrodes with nanometer separation by electromigration
Appl. Phys. Lett. 75, 301 (1999); doi:10.1063/1.124354
Issue Date: 12 July 1999
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A simple yet highly reproducible method to fabricate metallic electrodes with nanometer separation is presented. The fabrication is achieved by passing a large electrical current through a gold nanowire defined by electron-beam lithography and shadow evaporation. The current flow causes the electromigration of gold atoms and the eventual breakage of the nanowire. The breaking process yields two stable metallic electrodes separated by ~ 1 nm with high efficiency. These electrodes are ideally suited for electron-transport studies of chemically synthesized nanostructures, and their utility is demonstrated here by fabricating single-electron transistors based on colloidal cadmium selenide nanocrystals. ©1999 American Institute of Physics.
| History: | Received 11 March 1999; accepted 10 May 1999 |
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http://link.aip.org/link/?APPLAB/75/301/1 |
KEYWORDS and PACS
GOLD,
ELECTRODES,
FABRICATION,
ELECTRIC CURRENTS,
EVAPORATION,
WIRES,
TRANSISTORS,
electromigration,
electron beam lithography,
vacuum deposition
- 66.30.Qa
Transport properties of condensed matter (nonelectronic) Diffusion in solids Electromigration - 85.40.Hp
Electronic and magnetic devices; microelectronics Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology Lithography, masks and pattern transfer - 81.15.Ef
Materials science Methods of deposition of films and coatings; film growth and epitaxy Vacuum deposition - 68.55.Jk
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Structure and morphology; thickness - 85.40.Sz
Electronic and magnetic devices; microelectronics Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology Deposition technology - YEAR: 1999
PUBLICATION DATA
0003-6951 (print)
1077-3118 (online)
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