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Fabrication of nanoperiodic surface structures by controlled etching of dislocations in bicrystals

Appl. Phys. Lett. 78, 2205 (2001); doi:10.1063/1.1362330

Issue Date: 9 April 2001

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Rikard A. Wind
Department of Chemistry, Cornell University, Ithaca, New York 14853

Martin J. Murtagh and Fang Mei
Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853

Yu Wang and Melissa A. Hines
Department of Chemistry, Cornell University, Ithaca, New York 14853

Stephen L. Sass
Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853
A method for the fabrication of periodic arrays of surface features with controlled spacings of 2–100 nm has been developed. This process relies on the selective etching of dislocations formed at a twist–bonded interface in a bicrystal. The production of nanoscale periodic silicon surface features with a mean spacing of 38 nm is reported. The etch rate of edge and screw dislocations is compared, and the rate of dislocation etching is found to be poorly correlated to strain. This observation calls long-held theories of dislocation etching into question. ©2001 American Institute of Physics.
History: Received 18 December 2000; accepted 14 February 2001
Permalink: http://link.aip.org/link/?APPLAB/78/2205/1
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KEYWORDS and PACS

Keywords
PACS
  • 81.16.Rf
    Materials science Methods of nanofabrication and processing Nanoscale pattern formation
  • 61.72.Ff
    Structure of solids and liquids; crystallography Defects and impurities in crystals; microstructure Direct observation of dislocations and other defects (etch pits, decoration, electron microscopy, x-ray topography, etc.)
  • 81.65.Cf
    Materials science Surface treatments Surface cleaning, etching, patterning
  • 68.35.Bs
    Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Solid surfaces and solid-solid interfaces: Structure and energetics Structure of clean surfaces (reconstruction)
  • 68.35.Ct
    Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Solid surfaces and solid-solid interfaces: Structure and energetics Interface structure and roughness
  • 68.37.Ps
    Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Microscopy of surfaces, interfaces, and thin films Atomic force microscopy (AFM)
  • 81.05.Cy
    Materials science Specific materials: fabrication, treatment, testing and analysis Elemental semiconductors
  • YEAR: 2001

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
Publisher:
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REFERENCES (11)
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