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Infrared properties of room-temperature-deposited ZrO2

Appl. Phys. Lett. 79, 320 (2001); doi:10.1063/1.1384476

Issue Date: 16 July 2001

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L. Koltunski and R. A. B. Devine
Center for High Technology Materials, University of New Mexico, 1313 Goddard SE, Albuquerque, New Mexico 87106
ZrO2 films have been deposited at room temperature using Zr(OC4H9)4 and O2 source gases in a low-pressure electron-cyclotron-resonance-excited plasma reactor. The deposited films were, in general, mixed (amorphous and polycrystalline; monoclinic or tetragonal), the crystallinity depending upon the substrate polarization during deposition and the postdeposition annealing. Infrared vibrational modes of the films have been characterized. In as-deposited films, the dielectric constants were ~12–18, dependent upon sample bias during deposition, and the refractive indices were ~1.85–1.92. ©2001 American Institute of Physics.
History: Received 16 February 2001; accepted 17 May 2001
Permalink: http://link.aip.org/link/?APPLAB/79/320/1
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KEYWORDS and PACS

Keywords
PACS
  • 78.66.Nk
    Optical properties, condensed-matter spectroscopy and other interactions of radiation and particles with condensed matter Optical properties of specific thin films Insulators
  • 78.30.Hv
    Optical properties, condensed-matter spectroscopy and other interactions of radiation and particles with condensed matter Infrared and Raman spectra Other nonmetallic inorganics
  • 68.55.Jk
    Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Thin film structure and morphology Structure and morphology; thickness; crystalline orientation and texture
  • 81.15.Gh
    Materials science Methods of deposition of films and coatings; film growth and epitaxy Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)
  • 52.77.Dq
    Physics of plasmas and electric discharges Plasma applications Plasma-based ion implantation and deposition
  • 77.55.+f
    Dielectrics, piezoelectrics, and ferroelectrics and their properties Dielectric thin films
  • 78.20.Ci
    Optical properties, condensed-matter spectroscopy and other interactions of radiation and particles with condensed matter Optical properties of bulk materials and thin films Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
  • 77.22.Ch
    Dielectrics, piezoelectrics, and ferroelectrics and their properties Dielectric properties of solids and liquids Permittivity (dielectric function)
  • 77.84.Bw
    Dielectrics, piezoelectrics, and ferroelectrics and their properties Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials Elements, oxides, nitrides, borides, carbides, chalcogenides, etc.
  • 63.20.-e
    Lattice dynamics Phonons in crystal lattices
  • YEAR: 2001

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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