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WS2 nanotubes containing single-walled carbon nanotube bundles
Single-walled carbon nanotubes (SWCNs) encapsulated in multiwalled WS2 nanotubes are produced by pyrolyzing a mixture of WO3–x and SWCNs in N2/H2S atmosphere. ©2001 American Institute of Phy...

Patterned growth of single-walled carbon nanotubes on full 4-inch wafers

Appl. Phys. Lett. 79, 4571 (2001); doi:10.1063/1.1429294

Issue Date: 31 December 2001

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Nathan R. Franklin, Yiming Li, Robert J. Chen, Ali Javey, and Hongjie Dai
Department of Chemistry, Stanford University, Stanford, California 94305
Patterned growth of single-walled carbon nanotubes (SWNTs) is achieved on full 4-in. SiO2/Si wafers. Catalytic islands with high uniformity over the entire wafer are obtained by a deep ultraviolet photolithography technique. Growth by chemical vapor deposition of methane is found to be very sensitive to the amount of H2 co-flow. Understanding of the chemistry enables the growth of high quality SWNTs from massive arrays (107–108) of well-defined surface sites. The scale up in patterned nanotube growth shall pave the way to large-scale molecular wire devices. ©2001 American Institute of Physics.
History: Received 20 September 2001; accepted 19 October 2001
Permalink: http://link.aip.org/link/?APPLAB/79/4571/1
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KEYWORDS and PACS

Keywords
PACS
  • 81.07.De
    Materials science Nanoscale materials and structures: fabrication and characterization Nanotubes
  • 81.15.Gh
    Materials science Methods of deposition of films and coatings; film growth and epitaxy Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)
  • 81.16.Hc
    Materials science Methods of nanofabrication and processing Catalytic methods
  • 81.16.Nd
    Materials science Methods of nanofabrication and processing Nanolithography
  • YEAR: 2001

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ISSN:
0003-6951 (print)   1077-3118 (online)
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