Electrical properties of La-doped strontium titanate thin films
Appl. Phys. Lett. 80, 2928 (2002); doi:10.1063/1.1470694
Issue Date: 22 April 2002
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We report on the properties of lanthanum-doped SrTiO3 thin films grown by off-axis laser ablation on LaAlO3 and SrTiO3 substrates in oxygen partial pressures ranging from 108 Torr to 55 mTorr. The La/Sr doping ratio of the ablation target was 1%. The resulting films have carrier densities measured in the range of 4.717.5×1019 cm3 independent of temperature from room temperature to 4 K and low-temperature mobilities as high as 130 cm2/V s. These films are much more tolerant to the presence of oxygen during growth than were similar Nb-doped films reported previously. ©2002 American Institute of Physics.
| History: | Received 10 October 2001; accepted 26 February 2002 |
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http://link.aip.org/link/?APPLAB/80/2928/1 |
KEYWORDS and PACS
strontium compounds,
lanthanum,
semiconductor materials,
semiconductor thin films,
pulsed laser deposition,
electron density,
electron mobility,
Hall effect,
superconductor-semiconductor boundaries
- 73.50.Dn
Electronic structure and electrical properties of surfaces, interfaces, thin films, and low-dimensional structures Electronic transport phenomena in thin films Low-field transport and mobility; piezoresistance - 73.50.Jt
Electronic structure and electrical properties of surfaces, interfaces, thin films, and low-dimensional structures Electronic transport phenomena in thin films Galvanomagnetic and other magnetotransport effects (including thermomagnetic effects) - 81.15.Fg
Materials science Methods of deposition of films and coatings; film growth and epitaxy Laser deposition - 74.50.+r
Superconductivity Proximity effects, weak links, tunneling phenomena, and Josephson effects - 72.20.My
Electronic transport in condensed matter Conductivity phenomena in semiconductors and insulators Galvanomagnetic and other magnetotransport effects - 68.55.Jk
Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Thin film structure and morphology Structure and morphology; thickness; crystalline orientation and texture - 72.20.Fr
Electronic transport in condensed matter Conductivity phenomena in semiconductors and insulators Low-field transport and mobility; piezoresistance - YEAR: 2002
RELATED DATABASES
PUBLICATION DATA
0003-6951 (print)
1077-3118 (online)
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