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Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes

Appl. Phys. Lett. 80, 3817 (2002); doi:10.1063/1.1480877

Issue Date: 20 May 2002 | See: Erratum

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S. J. Wind, J. Appenzeller, R. Martel, V. Derycke, and Ph. Avouris
IBM T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598
We have fabricated single-wall carbon nanotube field-effect transistors (CNFETs) in a conventional metal–oxide–semiconductor field-effect transistor (MOSFET) structure, with gate electrodes above the conduction channel separated from the channel by a thin dielectric. These top gate devices exhibit excellent electrical characteristics, including steep subthreshold slope and high transconductance, at gate voltages close to 1 V—a significant improvement relative to previously reported CNFETs which used the substrate as a gate and a thicker gate dielectric. Our measured device performance also compares very well to state-of-the-art silicon devices. These results are observed for both p- and n-type devices, and they suggest that CNFETs may be competitive with Si MOSFETs for future nanoelectronic applications. ©2002 American Institute of Physics.
History: Received 24 January 2002; accepted 3 April 2002
Permalink: http://link.aip.org/link/?APPLAB/80/3817/1
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ERRATUM

  1. Erratum: "Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes" [Appl. Phys. Lett. 80, 3817 (2002)]
    S. J. Wind et al.
    Appl. Phys. Lett. 81, 1359 (2002)

KEYWORDS and PACS

Keywords
PACS
  • 85.35.Kt
    Electronic and magnetic devices; microelectronics Nanoelectronic devices Nanotube devices
  • 85.30.Tv
    Electronic and magnetic devices; microelectronics Semiconductor devices Field effect devices
  • 73.63.Fg
    Electronic structure and electrical properties of surfaces, interfaces, thin films, and low-dimensional structures Electronic transport in mesoscopic or nanoscale materials and structures Nanotubes
  • YEAR: 2002

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (16)

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  12. Due to the presence of the top gate, we were unable to obtain a direct measurement of the CNT diameter. However, the device characteristics—the steepness of the subthreshold slope in particular—are consistent with the behavior of a single SWNT device. (CNFETs with more than a very small number of nanotubes turn on gradually.) Thus, the normalized values given represent an upper bound.
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