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Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems

Appl. Phys. Lett. 81, 913 (2002); doi:10.1063/1.1497710

Issue Date: 29 July 2002

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Nathan R. Franklin, Qian Wang, Thomas W. Tombler, Ali Javey, Moonsub Shim, and Hongjie Dai
Stanford University, Department of Chemistry, Stanford, California 94305
A synthetic strategy is devised for reliable integration of long suspended single-walled carbon nanotubes into electrically addressable devices. The method involves patterned growth of nanotubes to bridge predefined molybdenum electrodes, and is versatile in yielding various microstructures comprised of suspended nanotubes that are electrically wired up. The approach affords single-walled nanotube devices without any postgrowth processing, and will find applications in scalable nanotube transistors (mobility up to 10 000 cm2/V s) and nanoelectromechanical systems based on nanowires. ©2002 American Institute of Physics.
History: Received 29 April 2002; accepted 11 June 2002
Permalink: http://link.aip.org/link/?APPLAB/81/913/1
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KEYWORDS and PACS

Keywords
PACS
  • 85.35.Kt
    Electronic and magnetic devices; microelectronics Nanoelectronic devices Nanotube devices
  • 73.63.Fg
    Electronic structure and electrical properties of surfaces, interfaces, thin films, and low-dimensional structures Electronic transport in mesoscopic or nanoscale materials and structures Nanotubes
  • 85.85.+j
    Electronic and magnetic devices; microelectronics Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 85.65.+h
    Electronic and magnetic devices; microelectronics Molecular electronic devices
  • 81.07.De
    Materials science Nanoscale materials and structures: fabrication and characterization Nanotubes
  • YEAR: 2002

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (19)
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