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Growth of suspended carbon nanotube networks on 100-nm-scale silicon pillars

Appl. Phys. Lett. 81, 2261 (2002); doi:10.1063/1.1507840

Issue Date: 16 September 2002

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Yoshikazu Homma, Yoshihiro Kobayashi, and Toshio Ogino
NTT Basic Research Laboratories, Nippon Telegraph and Telephone Corporation, Atsugi, Kanagawa 243-0198, Japan

Takayuki Yamashita
Department of Material Science and Technology, Tokai University, Numazu, Shizuoka 410-0395, Japan
We investigated carbon nanotube growth by means of methane chemical vapor deposition on ultrafine silicon patterns prepared by synchrotron-radiation lithography. Grown nanotubes formed suspended bridges between pillars when pillar spacing was comparable to pillar height. Network-like interconnections were obtained on pillar arrays. Nearest-neighbor bridging accounted for more than 80% of all the bridging nanotubes. The self-directed growth between neighboring pillars may be explained by the swing of the nanotube cantilever which contacts a catalyst particle in liquid phase as the nanotube grows. These results confirm the possibility of self-assembled wiring of nanostructures. ©2002 American Institute of Physics.
History: Received 31 May 2002; accepted 29 July 2002
Permalink: http://link.aip.org/link/?APPLAB/81/2261/1
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KEYWORDS and PACS

Keywords
PACS
  • 81.15.Gh
    Materials science Methods of deposition of films and coatings; film growth and epitaxy Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, etc.)
  • 68.55.Ac
    Surfaces and interfaces; thin films and low-dimensional systems (structure and nonelectronic properties) Thin film structure and morphology Nucleation and growth: microscopic aspects
  • 61.46.+w
    Structure of solids and liquids; crystallography Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals
  • 85.40.Hp
    Electronic and magnetic devices; microelectronics Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology Lithography, masks and pattern transfer
  • YEAR: 2002

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (10)

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