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Susceptibility of atomic force microscope cantilevers to lateral forces: Experimental verification

Appl. Phys. Lett. 83, 3195 (2003); doi:10.1063/1.1616657

Issue Date: 13 October 2003

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John E. Sader
Department of Mathematics and Statistics, University of Melbourne, Victoria 3010, Australia

Raymond C. Sader
D. F. Engineering Pty Ltd., 16 Exceller Avenue, Bankstown 2200, Australia
The performance of the atomic force microscope (AFM) is underpinned by the properties of its force-sensing microcantilever. Due to the universal belief that V-shaped cantilevers are more resistant to lateral forces than rectangular cantilevers, V-shaped cantilevers are used widely in the AFM. A recent theoretical study [J. E. Sader, Rev. Sci. Instrum. 74, 2438 (2003)], however, discounts this entrenched operating principle by theoretically establishing that V-shaped AFM cantilevers offer less resistance to lateral forces than rectangular cantilevers. Since this finding is difficult to test on (microscopic) AFM cantilevers, we conduct detailed measurements on model macroscopic cantilevers, and thus verify this theoretical prediction. ©2003 American Institute of Physics.
History: Received 7 April 2003; accepted 13 August 2003
Permalink: http://link.aip.org/link/?APPLAB/83/3195/1
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KEYWORDS and PACS

Keywords
PACS
  • 07.10.Cm
    Micromechanical devices and systems
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 07.79.Lh
    Atomic force microscopes
  • YEAR: 2003

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0003-6951 (print)   1077-3118 (online)
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REFERENCES (11)

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  1. T. R. Albrecht and C. F. Quate, J. Appl. Phys. 62, 2599 (1987).
  2. T. R. Albrecht, S. Akamine, T. E. Carver, and C. F. Quate, J. Vac. Sci. Technol. A 8, 3386 (1990).
  3. J. E. Sader, Rev. Sci. Instrum. 74, 2438 (2003).
  4. LUSAS is a trademark of, and is available from, FEA, Ltd., Forge House, 66 High Street, Kingston Upon Thames, Surrey, KT1 1HN, U.K. Quadrilateral elements were used for the rectangular cantilevers and along the skewed rectangular arms of the V-shaped cantilever. Triangular elements were used near the end tip of the V shape. Thick plate elements with linear interpolation were used; finite thickness affected normal spring constants by <5% in comparison to thin plate theory (see Ref. 9). Normal spring constants at the end tips were designed to be identical.
  5. J. E. Mark, Polymer Data Handbook (Oxford University Press, New York, 1999); PMMA was chosen due its resistance to (irreversible) plastic flow. PMMA exhibits (reversible) creeping flow that is insignificant over time scales required to perform measurements. Therefore, this nonideal behavior did not affect the results, see linearity in Fig. 3.
  6. Bending of the rod under its own weight was small (<~1 mm at its ends), and comparable to the resolution of distance measurements (±1 mm).
  7. The ratio of the torsional spring constants is identical to that of the lateral spring constants, provided both cantilevers have identical imaging tipheights, as is assumed.
  8. The cantilevers were designed to have identical normal spring constants at the end tips. Variation in the normal spring constants due to off-end loading between rectangular and V-shaped cantilever is <~5% (see Ref. 11). Accurate measurements of normal displacements, and hence, normal spring constants, were precluded by the resolution of distance measurements (±1 mm), since small deflections only are allowed (see Ref. 9).
  9. S. P. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells (McGraw-Hill, New York, 1959).
  10. Load positions DeltaL/L<0.05 proved impractical to implement.
  11. J. E. Sader, Rev. Sci. Instrum. 66, 4583 (1995).

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