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Carbonate formation during post-deposition ambient exposure of high-k dielectrics

Appl. Phys. Lett. 83, 3543 (2003); doi:10.1063/1.1623316

Issue Date: 27 October 2003

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Theodosia Gougousi, Dong Niu, Robert W. Ashcraft, and Gregory N. Parsons
Department of Chemical Engineering, North Carolina State University, Raleigh, North Carolina 27695
When thick films of group-III (La, Y)- and group-IV (Hf, Zr)-based high-k dielectrics are exposed to ambient for several months, Fourier transform infrared spectroscopy shows formation of carbonate species in the film bulk, likely due to reaction with atmospheric CO2. Group-III-based films show signs of carbonate feature growth within 10 min of air exposure, especially in films processed at relatively low temperatures (<600 °C). Carbonate formation is verified also for group-IV-based films, but at a significantly reduced concentration. Post-exposure annealing can reduce the carbonate observed in the IR spectra. However, post-exposure annealing likely does not remove carbon contamination, and it results in interface silicon oxide growth. The observed reactions of high-k films with the ambient may impose significant constraints on the post-deposition handling of high-k films. ©2003 American Institute of Physics.
History: Received 1 July 2003; accepted 9 September 2003
Permalink: http://link.aip.org/link/?APPLAB/83/3543/1
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KEYWORDS and PACS

Keywords
PACS
  • 77.55.+f
    Dielectric thin films
  • 77.22.Ch
    Permittivity (dielectric function)
  • 77.84.Bw
    Dielectric, piezoelectric, and ferroelectric elements, oxides, nitrides, borides, carbides, chalcogenides, etc.
  • 78.66.Nk
    Optical properties of insulators (thin films)
  • 78.30.Hv
    Infrared and Raman spectra in nonmetallic inorganics excluding elemental, II-VI and III-V semiconductors and fullerenes
  • 68.35.Dv
    Composition, segregation; defects and impurities (solid surfaces/interfaces)
  • 61.72.Cc
    Kinetics of defect formation and annealing
  • YEAR: 2003

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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