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Strain-tunable silicon photonic band gap microcavities in optical waveguides

Appl. Phys. Lett. 84, 1242 (2004); doi:10.1063/1.1649803

Issue Date: 23 February 2004 | See: Publisher's Note

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Chee Wei Wong
Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

Peter T. Rakich and Steven G. Johnson
Department of Physics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

Minghao Qi and Henry I. Smith
Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

Erich P. Ippen
Department of Physics and Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

Lionel C. Kimerling
Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

Yongbae Jeon, George Barbastathis, and Sang-Gook Kim
Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
We report the design, device fabrication, and measurements of tunable silicon photonic band gap microcavities in optical waveguides, using direct application of piezoelectric-induced strain to the photonic crystal. We show, through first-order perturbation computations and experimental measurements, a 1.54 nm shift in cavity resonances at 1.56 µm wavelengths for an applied strain of 0.04%. The strain is applied through integrated piezoelectric microactuators. For operation at infrared wavelengths, we combine x-ray and electron-beam lithography with thin-film piezoelectric processing. This level of integration permits realizable silicon-based photonic chip devices, such as high-density optical filters, with active reconfiguration. ©2004 American Institute of Physics.
History: Received 20 October 2003; accepted 19 December 2003; publisher error corrected 8 March 2004
Permalink: http://link.aip.org/link/?APPLAB/84/1242/1
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ERRATUM

  1. Publisher's Note: "Strain-tunable silicon photonic band gap microcavities in optical waveguides" [Appl. Phys. Lett. 84, 1242 (2004)]
    Chee Wei Wong et al.
    Appl. Phys. Lett. 84, 2955 (2004)

KEYWORDS and PACS

Keywords
PACS
  • 81.05.Cy
    Elemental semiconductors: fabrication, treatment, testing and analysis
  • 42.79.Gn
    Optical waveguides and couplers
  • 42.70.Qs
    Photonic bandgap materials
  • 85.50.-n
    Dielectric, ferroelectric, and piezoelectric devices
  • 42.79.Ci
    Optical filters, zone plates, and polarizers including spatial filters
  • 42.82.Cr
    Optical fabrication techniques; lithography, pattern transfer (integrated optics)
  • 85.40.Hp
    Lithography, masks and pattern transfer (microelectronics)
  • YEAR: 2004

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
Publisher:
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REFERENCES (18)
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