High quantum efficiency AlGaN solar-blind p-i-n photodiodes
Appl. Phys. Lett. 84, 1248 (2004); doi:10.1063/1.1650550
Issue Date: 23 February 2004
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We report AlGaN-based back-illuminated solar-blind ultraviolet p-i-n photodetectors with a peak responsivity of 136 mA/W at 282 nm without bias. This corresponds to a high external quantum efficiency of 60%, which improves to a value as high as 72% under 5 V reverse bias. We attribute the high performance of these devices to the use of a very-high quality AlN and Al0.87Ga0.13N/AlN superlattice material and a highly conductive SiIn co-doped Al0.5Ga0.5N layer. ©2004 American Institute of Physics.
| History: | Received 15 July 2003; accepted 30 December 2003 |
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0003-6951 (print)
1077-3118 (online)
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