Fluctuation microscopy studies of medium-range ordering in amorphous diamond-like carbon films
Appl. Phys. Lett. 84, 2823 (2004); doi:10.1063/1.1713048
Issue Date: 12 April 2004
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In this letter, we report fluctuation microscopy studies of medium-range ordering in amorphous diamond-like carbon films and the effect of annealing on this ordering. Annealed and unannealed diamond-like carbon films have almost identical short-range order. Our fluctuation microscopy results, however, indicate the presence of medium range order or clustering in the films on a lateral length scale that exceeds 1 nm. Within the clustered regions, the dominant local ordering appears to be diamond-like, and graphite-like ordering is not observed. Thermal annealing up to 600 °C leads to an increase in diamond-like clustering with no onset of graphite-like clustering. However, after high temperature annealing up to 1000 °C, graphite-like clustering becomes apparent as a result of the conversion of diamond-like carbon to graphite-like carbon. The results on the as-deposited films and films annealed up to 600 °C suggest that a spontaneous medium range ordering process occurs in diamond-like carbon films during and subsequent to film growth, and this may play an important role in stress relaxation. ©2004 American Institute of Physics.
| History: | Received 5 August 2003; accepted 25 February 2004 |
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KEYWORDS and PACS
diamond-like carbon,
thin films,
amorphous state,
annealing,
short-range order,
fluctuations,
stress relaxation
- 68.55.Jk
Thin film structure and morphology; thickness; crystalline orientation and texture - 68.37.-d
Microscopy of surfaces, interfaces, and thin films - 61.43.Er
Structure of other amorphous solids excluding amorphous semiconductors, metals, and alloys, glasses, powders and porous materials - 81.40.Ef
Cold working, work hardening and annealing including post-deformation annealing, quenching, tempering recovery, and crystallization - 62.40.+i
Anelasticity, internal friction, stress relaxation, and mechanical resonances - 81.40.Jj
Elasticity and anelasticity, stress-strain relations - YEAR: 2004
RELATED DATABASES
PUBLICATION DATA
0003-6951 (print)
1077-3118 (online)
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