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Evolution of dislocation arrays in epitaxial BaTiO3 thin films grown on (100) SrTiO3

Appl. Phys. Lett. 84, 3298 (2004); doi:10.1063/1.1728300

Issue Date: 26 April 2004

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H. P. Sun, W. Tian, and X. Q. Pan
Department of Materials Science & Engineering, University of Michigan, Ann Arbor, Michigan 48109-2136

J. H. Haeni and D. G. Schlom
Department of Materials Science & Engineering, Penn State University, University Park, Pennsylvania 16802-5005
Dislocation arrays and dislocation half-loops in BaTiO3 thin films were characterized using transmission electron microscopy (TEM). BaTiO3 films with thicknesses ranging from 2 to 20 nm were grown on (100) SrTiO3 by reactive molecular beam epitaxy (MBE). The critical thickness for dislocations to occur in this system was found to lie between 2 and 4 nm. The misfit dislocations are mainly <100> type. The average spacing between the dislocations in the array becomes smaller when the film is thicker, which indicates gradual relaxation of mismatch strain with increasing film thickness.©2004 American Institute of Physics.
History: Received 29 September 2003; accepted 1 March 2004
Permalink: http://link.aip.org/link/?APPLAB/84/3298/1
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KEYWORDS and PACS

Keywords
PACS
  • 61.72.Ff
    Direct observation of dislocations and other defects including etch pits, decoration, electron microscopy, x-ray topography, etc.
  • 61.72.Lk
    Linear defects: dislocations, disclinations
  • 77.55.+f
    Dielectric thin films
  • 81.15.Hi
    Molecular, atomic, ion, and chemical beam epitaxy
  • 77.80.-e
    Ferroelectricity and antiferroelectricity
  • 81.40.Jj
    Elasticity and anelasticity, stress-strain relations
  • 62.40.+i
    Anelasticity, internal friction, stress relaxation, and mechanical resonances
  • 77.84.Dy
    Dielectric, piezoelectric, and ferroelectric niobates, titanates, tantalates, PZT ceramics, etc
  • 68.37.Lp
    Transmission electron microscopy (TEM) of surfaces, interfaces and thin films including STEM, HRTEM, etc
  • YEAR: 2004

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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