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Imaging nanostructures with coherent phonon pulses

Appl. Phys. Lett. 84, 5180 (2004); doi:10.1063/1.1764599

Published 10 June 2004

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B. C. Daly, N. C. R. Holme, T. Buma, C. Branciard, and T. B. Norris
Center for Ultrafast Optical Science and EECS Department, University of Michigan, Ann Arbor, Michigan 48109-2099

D. M. Tennant, J. A. Taylor, J. E. Bower, and S. Pau
Bell Laboratories, Lucent Technologies Murray Hill, New Jersey 07974
We demonstrate submicron resolution imaging using picosecond acoustic phonon pulses. High-frequency acoustic pulses are generated by impulsive thermoelastic excitation of a patterned 15-nm-thick metal film on a crystalline substrate using ultrafast optical pulses. The spatiotemporal diffracted acoustic strain field is measured on the opposite side of the substrate, and this field is used in a time-reversal algorithm to reconstruct the object. The image resolution is characterized using lithographically defined 1-micron-period Al structures on Si. Straightforward technical improvements should lead to resolution approaching 45  nm, extending the resolution of acoustic microscopy into the nanoscale regime. ©2004 American Institute of Physics
History: Received 4 February 2004; accepted 26 April 2004; published 10 June 2004
Permalink: http://link.aip.org/link/?APPLAB/84/5180/1
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KEYWORDS and PACS

Keywords
PACS
  • 43.35.Sx
    Acoustooptical effects, optoacoustics, acoustical visualization, acoustical microscopy, and acoustical holography
  • 43.35.Yb
    Ultrasonic instrumentation and measurement techniques
  • 42.65.Re
    Ultrafast processes; optical pulse generation and pulse compression
  • YEAR: 2004

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
Publisher:
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REFERENCES (19)
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