Rayleigh scattering, mode coupling, and optical loss in silicon microdisks
Appl. Phys. Lett. 85, 3693 (2004); doi:10.1063/1.1811378
Issue Date: 25 October 2004
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High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500 nm wavelength band show that these silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2×105, limited by Rayleigh scattering from fabrication induced surface roughness. Microdisks with radii as small as 2.5 µm are studied, with measured quality factors as high as 4.7×105 for an optical mode volume of 5.3 (
/n)3.
©2004 American Institute of Physics
/n)3.
©2004 American Institute of Physics
| History: | Received 22 June 2004; accepted 7 September 2004 |
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0003-6951 (print)
1077-3118 (online)
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