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Rayleigh scattering, mode coupling, and optical loss in silicon microdisks

Appl. Phys. Lett. 85, 3693 (2004); doi:10.1063/1.1811378

Issue Date: 25 October 2004

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Matthew Borselli, Kartik Srinivasan, Paul E. Barclay, and Oskar Painter
Department of Applied Physics, California Institute of Technology, Pasadena, California 91125
High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500  nm wavelength band show that these silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2×105, limited by Rayleigh scattering from fabrication induced surface roughness. Microdisks with radii as small as 2.5  µm are studied, with measured quality factors as high as 4.7×105 for an optical mode volume of 5.3  (lambda/n)3. ©2004 American Institute of Physics
History: Received 22 June 2004; accepted 7 September 2004
Permalink: http://link.aip.org/link/?APPLAB/85/3693/1
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KEYWORDS and PACS

Keywords
PACS
  • 42.55.Sa
    Microcavity and microdisk lasers
  • 42.55.Px
    Semiconductor lasers; laser diodes
  • 68.35.Bs
    Structure of clean solid surfaces (reconstruction)
  • YEAR: 2004

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ISSN:
0003-6951 (print)   1077-3118 (online)
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