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Add-drop filters utilizing vertically coupled microdisk resonators in silicon

Appl. Phys. Lett. 86, 091102 (2005); doi:10.1063/1.1873064

Published 23 February 2005

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Prakash Koonath, Tejaswi Indukuri, and Bahram Jalali
Department of Electrical Engineering, University of California, Los Angeles, Los Angeles, California 90095-1594
Add-drop filters, based on vertically coupled microdisk resonators, have been realized in silicon, using a modified separation by implantation of oxygen process. Buried rib waveguides in the bottom-layer silicon, of a two-layer structure, are coupled to microdisk resonators in the top-layer silicon through a silicon dioxide layer formed by oxygen implantation. The radii of the microdisk structures were varied suitably to obtain resonators with slightly shifted resonance wavelengths. The average adjacent channel crosstalk suppression of these filters exhibits an upper limit of 12.11  dB and a lower limit of 6.2  dB over the wavelength band under consideration. ©2005 American Institute of Physics
History: Received 11 October 2004; accepted 11 January 2005; published 23 February 2005
Permalink: http://link.aip.org/link/?APPLAB/86/091102/1
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KEYWORDS and PACS

Keywords
PACS
  • 42.79.Ci
    Optical filters, zone plates, and polarizers including spatial filters
  • 42.79.Gn
    Optical waveguides and couplers
  • 81.16.Pr
    Nanooxidation in nanofabrication and processing
  • YEAR: 2005

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (8)
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