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Magnesium oxide as a candidate high-kappa gate dielectric

Appl. Phys. Lett. 88, 142901 (2006); doi:10.1063/1.2191419

Published 3 April 2006

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L. Yan, C. M. Lopez, R. P. Shrestha, and E. A. Irene
Department of Chemistry, University of North Carolina, Chapel Hill, North Carolina 27599-3290

A. A. Suvorova and M. Saunders
Centre for Microscopy and Microanalysis, University of Western Australia, Crawley 6009, Western Australia (WA), Australia
Magnesium oxide (MgO) thin films with sharp interfaces were deposited by sputtering of a Mg target on Si. The film stack was characterized using spectroscopic ellipsometry and transmission electron microscopy and the film static dielectric constant (kappa) and interface traps were determined. An amorphous SiO2 layer was found at the MgO/Si interface as a result of subcutaneous Si oxidation. kappa for the MgO films was found to be about twice that of SiO2, and the interface trap densities of MgO/Si were found to be comparable with SiO2/Si, rendering MgO competitive with all presently considered high-kappa dielectrics. ©2006 American Institute of Physics
History: Received 11 November 2005; accepted 6 March 2006; published 3 April 2006
Permalink: http://link.aip.org/link/?APPLAB/88/142901/1
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KEYWORDS and PACS

Keywords
PACS
  • 77.55.+f
    Dielectric thin films
  • 77.84.Bw
    Dielectric, piezoelectric, and ferroelectric elements, oxides, nitrides, borides, carbides, chalcogenides, etc.
  • 81.15.Cd
    Deposition by sputtering
  • 68.55.Ac
    Thin film nucleation and growth: microscopic aspects
  • 73.20.At
    Surface states, band structure, electron density of states
  • 73.40.Qv
    Electrical properties of metal–insulator–semiconductor structures including semiconductor-to-insulator
  • YEAR: 2006

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (6)

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  2. Y. Gao, A. H. Mueller, E. A. Irene, O. Auciello, A. R. Krauss, and J. A. Schultz, J. Vac. Sci. Technol. A 17, 1880 (1999).
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  4. N. A. Suvorova, C. M. Lopez, E. A. Irene, A. A. Suvorova, and M. Saunders, J. Appl. Phys. 95, 2672 (2004).
  5. D. Franta and I. Ohlidal, Surf. Interface Anal. 30, 574 (2000).
  6. D. K. Schroder, Semiconductor Material and Device Characterization (Wiley, New York, 1990).

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