Magnesium oxide as a candidate high-
gate dielectric
Appl. Phys. Lett. 88, 142901 (2006); doi:10.1063/1.2191419
Published 3 April 2006
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Magnesium oxide (MgO) thin films with sharp interfaces were deposited by sputtering of a Mg target on Si. The film stack was characterized using spectroscopic ellipsometry and transmission electron microscopy and the film static dielectric constant (
) and interface traps were determined. An amorphous SiO2 layer was found at the MgO/Si interface as a result of subcutaneous Si oxidation.
for the MgO films was found to be about twice that of SiO2, and the interface trap densities of MgO/Si were found to be comparable with SiO2/Si, rendering MgO competitive with all presently considered high-
dielectrics.
©2006 American Institute of Physics
) and interface traps were determined. An amorphous SiO2 layer was found at the MgO/Si interface as a result of subcutaneous Si oxidation.
for the MgO films was found to be about twice that of SiO2, and the interface trap densities of MgO/Si were found to be comparable with SiO2/Si, rendering MgO competitive with all presently considered high-
dielectrics.
©2006 American Institute of Physics
| History: | Received 11 November 2005; accepted 6 March 2006; published 3 April 2006 |
| Permalink: |
http://link.aip.org/link/?APPLAB/88/142901/1 |
KEYWORDS and PACS
silicon,
magnesium compounds,
silicon compounds,
high-k dielectric thin films,
dielectric materials,
elemental semiconductors,
semiconductor-insulator boundaries,
permittivity,
sputter deposition,
ellipsometry,
transmission electron microscopy,
interface states,
amorphous state,
interface structure,
oxidation
- 77.55.+f
Dielectric thin films - 77.84.Bw
Dielectric, piezoelectric, and ferroelectric elements, oxides, nitrides, borides, carbides, chalcogenides, etc. - 81.15.Cd
Deposition by sputtering - 68.55.Ac
Thin film nucleation and growth: microscopic aspects - 73.20.At
Surface states, band structure, electron density of states - 73.40.Qv
Electrical properties of metalinsulatorsemiconductor structures including semiconductor-to-insulator - YEAR: 2006
RELATED DATABASES
PUBLICATION DATA
0003-6951 (print)
1077-3118 (online)
REFERENCES (6)
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