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Optical coatings by ion-beam sputtering deposition for long-wave infrared quantum cascade lasers

Appl. Phys. Lett. 89, 111113 (2006); doi:10.1063/1.2353815

Published 13 September 2006

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J. Nguyen, J. S. Yu, A. Evans, S. Slivken, and M. Razeghi
Center for Quantum Devices, Department of Electrical Engineering and Computer Science, Northwestern University, Evanston, Illinois 60208
The authors report on the development of high-reflection and multilayer antireflection coatings using ion-beam sputtering deposition for long-wave infrared (lambda~9.4  µm) quantum cascade lasers. A metallic high-reflection coating structure using Y2O3 and Au is demonstrated to achieve a high reflectance of 96.70%, and the use of a multilayer anti-reflection coating structure using PbTe and ZnO is demonstrated to achieve a very low reflectance of 1.64%. A 170% improvement of peak laser output power and a 169% increase in wall-plug efficiency are reported without any beam steering effects. ©2006 American Institute of Physics
History: Received 24 May 2006; accepted 28 July 2006; published 13 September 2006
Permalink: http://link.aip.org/link/?APPLAB/89/111113/1
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KEYWORDS and PACS

Keywords
PACS
  • 42.79.Wc
    Optical coatings
  • 81.15.Jj
    Ion and electron beam-assisted deposition; ion plating
  • 81.15.Cd
    Deposition by sputtering
  • 42.55.Px
    Semiconductor lasers; laser diodes
  • YEAR: 2006

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (11)
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