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Micromachined piconewton force sensor for biophysics investigations

Appl. Phys. Lett. 89, 173901 (2006); doi:10.1063/1.2364118

Published 23 October 2006

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Steven J. Koch, Gayle E. Thayer, Alex D. Corwin, and Maarten P. de Boer
Sandia National Laboratories, Albuquerque, New Mexico 87185
We describe a micromachined force sensor that is able to measure forces as small as 1  pN in both air and water. First, we measured the force field produced by an electromagnet on individual 2.8  µm magnetic beads glued to the sensor. By repeating with 11 different beads, we measured a 9% standard deviation in saturation magnetization. We next demonstrated that the sensor was fully functional when immersed in physiological buffer. These results show that the force sensors can be useful for magnetic force calibration and also for measurement of biophysical forces on chip. ©2006 American Institute of Physics
History: Received 5 June 2006; accepted 2 September 2006; published 23 October 2006
Permalink: http://link.aip.org/link/?APPLAB/89/173901/1
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KEYWORDS and PACS

Keywords
PACS
  • 87.80.-y
    Biological techniques and instrumentation; biomedical engineering
  • 07.07.Df
    Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
  • 07.10.Pz
    Instruments for strain, force, and torque
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 85.70.-w
    Magnetic devices
  • 06.20.fb
    Standards and calibration
  • YEAR: 2006

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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