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Optimal drive condition for nonlinearity reduction in electrostatic microresonators

Appl. Phys. Lett. 89, 214105 (2006); doi:10.1063/1.2388886

Published 20 November 2006

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Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Chandra M. Jha, Thomas W. Kenny, and Boris Murmann
Department of Electrical, Stanford University, Stanford, California 94305 and Department of Mechanical Engineering, Stanford University, Stanford, California 94305
A model for the amplitude-frequency (A-f) effect in electrostatic microresonators is presented. This effect is an undesired nonlinear phenomenon that sets the maximum usable oscillation current and thereby degrades the resonator's signal-to-noise ratio and performance. The model developed in this letter provides analytical expressions for the A-f effect and derives an optimal bias condition that maximizes the usable current. In addition, the authors present experimental data for a double-ended-tuning-fork resonator. Using the derived bias condition, an improvement of more than two times in the sustainable oscillation current has been achieved. ©2006 American Institute of Physics
History: Received 18 August 2006; accepted 9 October 2006; published 20 November 2006
Permalink: http://link.aip.org/link/?APPLAB/89/214105/1
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KEYWORDS and PACS

Keywords
PACS
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • YEAR: 2006

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (11)
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