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Sound beyond the speed of light: Measurement of negative group velocity in an acoustic loop filter
The authors describe the experimental observation of negative group velocity propagation of sound waves through an asymmetric loop filter. The characteristics of the filter are established using impul...

Acceleration sensitivity in beam-type electrostatic microresonators

Appl. Phys. Lett. 90, 014103 (2007); doi:10.1063/1.2426884

Published 2 January 2007

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Manu Agarwal, Kwan K. Park, Saurabh A. Chandorkar, Rob N. Candler, Bongsang Kim, Matthew A. Hopcroft, Renata Melamud, Thomas W. Kenny, and Boris Murmann
Department of Electrical Engineering, Stanford University, Stanford, California 94305 and Department of Mechanical Engineering, Stanford University, Stanford, California 94305
This letter examines the dependence of the natural frequency in a microelectromechanical resonator on externally applied acceleration. The particular structure studied is an electrostatically coupled, single anchored, double-ended silicon tuning fork. The authors find that the acceleration dependence in this resonator is primarily due to axial stress on the resonator beams. Measurements show an acceleration sensitivity Deltaf/f0 of 7×10−9/g, which is comparable to values found for typical quartz crystal resonators. This result was obtained using dynamic (vibration) measurements, and validated using theoretical analysis and finite element simulations. ©2007 American Institute of Physics
History: Received 12 October 2006; accepted 27 November 2006; published 2 January 2007; publisher error corrected 11 January 2007
Permalink: http://link.aip.org/link/?APPLAB/90/014103/1
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KEYWORDS and PACS

Keywords
PACS
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 07.10.Cm
    Micromechanical devices and systems
  • YEAR: 2006

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (10)
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  1. R. L. Filler, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 35, 297 (1988).
  2. R. Beeson, J. J. Gagnepain, D. Janiaud, and M. Valdois, Proceedings Frequancy Control Symposium, 1979, p. 337.
  3. J. R. Vig, C. Audoin, L. S. Cutler, M. M. Driscoll, E. P. EerNisse, R. L. Filler, R. M. Garvey, W. J. Riley, R. C. Smythe, and R. D. Weglein, Proceeding of the Frequency Control Symposium, 1992, p. 763.
  4. C. T.-C. Nguyen, Technical Digest-Solid-State Sensors, Actuators and Microsystens Workshop, 2005, Vol. 1, p. 243.
  5. R. N. Candler, M. Hopcroft, B. Kim, W.-T. Park, R. Melamud, M. Agarwal, G. Yama, A. Partridge, M. Lutz, and T. W. Kenny, IEEE J. Microelectromech. Syst.15, 1446 (2006).
  6. R. N. Candler, A. Duwel, M. Varghese, S. A. Chandorkar, M. A. Hopcroft, W.-T. Park, B. Kim, G. Yama, A. Partridge, M. Lutz, and T. W. Kenny, J. Microelectromech. Syst. 15, 927 (2006).
  7. Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, IEEE J. Solid-State Circuits 39, 2477 (2004).
  8. R. Melamud, M. Hopcroft, C. Jha, B. Kim, S. Chandorkar, R. Candler, and T. W. Kenny, Technical Digest Solid-State Sensors, Actuators and Microsystens workshop, 2005, Vol. 1, p. 392.
  9. http://www.comsol.com/
  10. S. Seok, H. Kim, and K. Chun, Proceedings of the IEEE Sensors, 2004, Vol. 2, p. 654.

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