Near bulk-limited R0A of long-wavelength infrared type-II InAs/GaSb superlattice photodiodes with polyimide surface passivation
Appl. Phys. Lett. 90, 233513 (2007); doi:10.1063/1.2747172
Published 11 June 2007
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Effective surface passivation of type-II InAs/GaSb superlattice photodiodes with cutoff wavelengths in the long-wavelength infrared is presented. A stable passivation layer, the electrical properties of which do not change as a function of the ambient environment nor time, has been prepared by a solvent-based surface preparation, vacuum desorption, and the application of an insulating polyimide layer. Passivated photodiodes, with dimensions ranging from 400×400 to 25×25 µm2, with a cutoff wavelength of ~11 µm, exhibited near bulk-limited R0A values of ~12
cm2, surface resistivities in excess of 104
cm, and very uniform current-voltage behavior at 77 K.
©2007 American Institute of Physics
cm2, surface resistivities in excess of 104
cm, and very uniform current-voltage behavior at 77 K.
©2007 American Institute of Physics
| History: | Received 18 April 2007; accepted 14 May 2007; published 11 June 2007 |
| Permalink: |
http://link.aip.org/link/?APPLAB/90/233513/1 |
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0003-6951 (print)
1077-3118 (online)
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