Applied Physics Letters
Feedback | Help | Exit
Applied Physics Letters
Search:
   
 
 
 
Previous Article
Spatially resolved photoluminescence mapping of single CdS nanosheets
We have utilized spatially resolved low temperature photoluminescence to probe the electronic states and structural symmetries of individual single crystalline CdS nanosheets. Spatially resolved photo...
Next Article
Enhanced charge carrier generation in dye sensitized solar cells by nanoparticle plasmons
An interesting possibility to improve the conversion and cost efficiencies of photovoltaic solar cells is to exploit the large optical cross sections of localized (nanoparticle) surface plasmon resona...

A megahertz nanomechanical resonator with room temperature quality factor over a million

Appl. Phys. Lett. 92, 013112 (2008); doi:10.1063/1.2822406

Published 4 January 2008

You are not logged in to this journal. Log in

Scott S. Verbridge
Department of Physics, Cornell University, Ithaca, New York 14853, USA

Harold G. Craighead
School of Applied and Engineering Physics and the Cornell Center for Materials Research, Cornell University, Ithaca, New York 14853, USA

Jeevak M. Parpia
Department of Physics and the Cornell Center for Materials Research, Cornell University, Ithaca, New York 14853, USA
We demonstrate the fabrication and operation of high aspect ratio tensile stressed silicon nitride string resonators. We explore the parameter space of small cross sections, on the order of 100  nm, and long lengths up to 325  µm, demonstrating that such high aspect ratio resonators can be made with standard wet release processing using a material with internal tensile stress. Room temperature quality factors exceed one million at frequencies above 1  MHz. The utility of such high quality factor flexural resonators to probe the interaction of high frequency nanoscale devices with rarefied gases is demonstrated. ©2008 American Institute of Physics
History: Received 8 October 2007; accepted 16 November 2007; published 4 January 2008
Permalink: http://link.aip.org/link/?APPLAB/92/013112/1
BUY THIS ARTICLE   (US$24)
Download HTML Download Sectioned HTML Download PDF (252 kB) View Cart

KEYWORDS and PACS

Keywords
PACS
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 84.30.Ng
    Oscillators, pulse generators, and function generators
  • 85.35.-p
    Nanoelectronic devices
  • YEAR: 2007

RELATED DATABASES


To view database links for this article,
you need to log in.
To view database links for this article,
you need to log in.

PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
Publisher:
AIP is a member of CrossRef AIP

REFERENCES (31)
View in Separate Window/Tab
For access to fully linked references, you need to log in. For access to fully linked references, you need to Log in.
  1. B. Ilic, H. G. Craighead, S. Krylov, W. Senaratne, C. Ober, and P. Neuzil, J. Appl. Phys. 95, 3694 (2004).
  2. K. L. Ekinci, X. M. H. Huang, and M. L. Roukes, Appl. Phys. Lett. 84, 4469 (2004).
  3. A. Cleland and M. Roukes, Nature (London) 392, 160 (1998).
  4. J. S. Bunch, A. M. Van der Zande, S. S. Verbridge, I. W. Frank, D. M. Tanenbaum, J. M. Parpia, H. G. Craighead, and P. L. McEuen, Science 315, 490 (2007).
  5. M. D. LaHaye, O. Buu, B. Camarota, and K. C. Schwab, Science 304, 74 (2004).
  6. A. Naik, O. Buu, M. LaHaye, A. Armour, A. Clerk, M. Blencowe, and K. Schwab, Nature (London) 443, 193 (2006).
  7. A. Wong and C. Nguyen, J. Microelectromech. Syst. 13, 100 (2004).
  8. D. Karabacak, V. Yakhot, and K. Ekinci, Phys. Rev. Lett. 98, 254505 (2007).
  9. S. Masmanidis, R. Karabalin, I. Vlaminck, G. Borghs, M. Freeman, and M. Roukes, Science 317, 780 (2007).
  10. M. Zalalutdinov, J. Baldwin, M. Marcus, R. Reichenbach, J. Parpia, and B. Houston, Appl. Phys. Lett. 88, 143504 (2006).
  11. K. L. Ekinci, Y. T. Yang, and M. L. Roukes, J. Appl. Phys. 95, 2682 (2004).
  12. K. Ekinci and M. Roukes, Rev. Sci. Instrum. 76, 1 (2005).
  13. H. Craighead, Science 290, 1532 (2000).
  14. D. W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 75, 920 (1999).
  15. K. Numata, G. Bianc, M. Tanaka, S. Otsuka, K. Kawabe, M. Ando, and K. Tsubono, Phys. Lett. A 284, 162 (2001).
  16. J. Yang, T. Ono, and M. Esashi, Appl. Phys. Lett. 77, 3860 (2000).
  17. K. L. Aubin, M. Zalalutdinov, R. Reichenbach, B. Houston, A. T. Zehnder, J. M. Parpia, and H. G. Craighead, Proc. SPIE 5116, 531 (2003).
  18. L. Haiberger, D. Jager, and S. Schiller, Rev. Sci. Instrum. 76, 1 (2005).
  19. X. Liu, J. F. Vignola, H. J. Simpson, B. R. Lemon, B. H. Houston, and D. M. Photiadis, J. Appl. Phys. 97, 023524 (2005).
  20. J. Thompson, B. Zwickl, A. Jayich, F. Marquardt, S. Girvin, and J. Harris, e-print arXiv:0707.1724 (2007).
  21. S. S. Verbridge, J. M. Parpia, R. B. Reichenbach, L. M. Bellan, and H. G. Craighead, J. Appl. Phys. 99, 124304 (2006).
  22. S. S. Verbridge, D. F. Shapiro, H. G. Craighead, and J. M. Parpia, Nano Lett. 7, 1728 (2007).
  23. V. Sazonova, Y. Yaish, H. Ustunel, D. Roundy, T. A. Arias, and P. L. McEuen, Nature (London) 431, 284 (2004).
  24. C. T. C. Nguyen, IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control54, 251 (2007).
  25. R. Lifshitz and M. L. Roukes, Phys. Rev. B 61, 5600 (2000).
  26. V. Braginsky, V. Mitrofanov, and V. Panov, Systems with Small Dissipation (University of Chicago Press, Chicago, 1985), pp. 10–15.
  27. S. Bianco, M. Cocuzza, S. Ferrero, E. Giuri, G. Piacenza, C. F. Pirri, A. Ricci, L. Scaltrito, D. Bich, A. Merialdo, P. Schina, and R. Correale, J. Vac. Sci. Technol. B 24, 1803 (2006).
  28. K. Brueckner, V. Cimalla, F. Niebelschutz, R. Stephan, K. Tonisch, O. Ambacher, and M. Hein, J. Micromech. Microeng. 17, 2016 (2007).
  29. F. Blom, S. Bouwstra, M. Elwenspoek, and J. Fluitman, J. Vac. Sci. Technol. B 10 (1992).
  30. R. B. Bhiladvala and Z. J. Wang, Phys. Rev. E 69, 036307 (2004).
  31. M. Li, H. X. Tang, and M. L. Roukes, Nat. Nanotechnol. 2, 114 (2007).

CITING ARTICLES
For access to citing articles, you need to log in.
For access to citing articles, you need to Log in.


Copyright © American Institute of Physics