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Broadband moth-eye antireflection coatings on silicon

Appl. Phys. Lett. 92, 061112 (2008); doi:10.1063/1.2870080

Published 14 February 2008

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Chih-Hung Sun,1 Peng Jiang,1 and Bin Jiang2
1Department of Chemical Engineering, University of Florida, Gainesville, Florida 32611, USA
2Department of Mathematics and Statistics, Portland State University, Portland, Oregon 97201, USA
We report a bioinspired templating technique for fabricating broadband antireflection coatings that mimic antireflective moth eyes. Wafer-scale, subwavelength-structured nipple arrays are directly patterned on silicon using spin-coated silica colloidal monolayers as etching masks. The templated gratings exhibit excellent broadband antireflection properties and the normal-incidence specular reflection matches with the theoretical prediction using a rigorous coupled-wave analysis (RCWA) model. We further demonstrate that two common simulation methods, RCWA and thin-film multilayer models, generate almost identical prediction for the templated nipple arrays. This simple bottom-up technique is compatible with standard microfabrication, promising for reducing the manufacturing cost of crystalline silicon solar cells. ©2008 American Institute of Physics
History: Received 19 December 2007; accepted 26 January 2008; published 14 February 2008
Permalink: http://link.aip.org/link/?APPLAB/92/061112/1

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KEYWORDS and PACS

Keywords
PACS
  • 42.79.Wc
    Optical coatings
  • 81.15.-z
    Methods of deposition of films and coatings
  • 82.70.Dd
    Colloids
  • 84.60.Jt
    Photoelectric conversion: solar cells and arrays
  • YEAR: 2008

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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