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A study of electrostatic force nonlinearities in resonant microstructures

Appl. Phys. Lett. 92, 104106 (2008); doi:10.1063/1.2834707

Published 14 March 2008

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Manu Agarwal,1 Saurabh A. Chandorkar,1 Harsh Mehta,1 Robert N. Candler,2 Bongsang Kim,1 Matthew A. Hopcroft,1 Renata Melamud,1 Chandra M. Jha,1 Gaurav Bahl,1 Gary Yama,2 Thomas W. Kenny,1 and Boris Murmann1
1Departments of Electrical and Mechanical Engineering, Stanford University, Stanford, California 94305, USA
2Robert Bosch Corporation (Research and Technology Center), Palo Alto, California 94040, USA
This letter investigates the nature of amplitude frequency (A-f) dependence caused by nonlinearities in the parallel plate electrostatic transduced in resonant microstructures. We present analytical and experimental evidences that the A-f nonlinearities are practically always dominated by third order nonlinear terms. For an electrostatically unbalanced system, we show that the bias voltage at which second and third order nonlinearities have equal impact on A-f dependence corresponds to ~90% of the dc pull-in voltage. ©2008 American Institute of Physics
History: Received 25 June 2007; accepted 17 December 2007; published 14 March 2008
Permalink: http://link.aip.org/link/?APPLAB/92/104106/1
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KEYWORDS and PACS

Keywords
PACS
  • 07.10.Cm
    Micromechanical devices and systems
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • YEAR: 2008

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (13)
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