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Enhanced light emission in photonic crystal nanocavities with Erbium-doped silicon nanocrystals

Appl. Phys. Lett. 92, 161107 (2008); doi:10.1063/1.2916711

Published 22 April 2008 | See: Erratum

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Maria Makarova,1 Vanessa Sih,1 Joe Warga,2 Rui Li,2 Luca Dal Negro,2 and Jelena Vuckovic1
1Department of Electrical Engineering, Stanford University, Stanford, California 94305, USA
2Department of Electrical and Computer Engineering, Boston University, Boston, Massachusetts 02215, USA

Photonic crystal nanocavities are fabricated in silicon membranes covered by thermally annealed silicon-rich nitride films with Erbium-doped silicon nanocrystals. Silicon nitride films were deposited by sputtering on top of silicon on insulator wafers. The nanocavities were carefully designed in order to enhance emission from the nanocrystal sensitized Erbium at the 1540  nm wavelength. Experimentally measured quality factors of ~6000 were found to be consistent theoretical predictions. The Purcell factor of 1.4 was estimated from the observed 20-fold enhancement of Erbium luminescence. ©2008 American Institute of Physics
History: Received 7 February 2008; accepted 1 April 2008; published 22 April 2008
Permalink: http://link.aip.org/link/?APPLAB/92/161107/1
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ERRATUM

  1. Erratum: “Enhanced light emission in photonic crystal nanocavities with erbium-doped silicon nanocrystals” [Appl. Phys. Lett. 92, 161107 (2008)]
    Maria Makarova et al.
    Appl. Phys. Lett. 92, 219902 (2008)

KEYWORDS and PACS

Keywords
PACS
  • 78.55.Ap
    Photoluminescence in elemental semiconductors
  • 81.15.Cd
    Deposition by sputtering
  • 81.16.-c
    Methods of nanofabrication and processing
  • 81.07.Bc
    Nanocrystalline materials: fabrication and characterization
  • 78.67.Bf
    Optical properties of nanocrystals and nanoparticles
  • YEAR: 2008

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (10)

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