Creating large area molecular electronic junctions using atomic layer deposition
Appl. Phys. Lett. 92, 213301 (2008); doi:10.1063/1.2917870
Published 27 May 2008
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We demonstrate a technique for creating large area, electrically stable molecular junctions. We use atomic layer deposition to create nanometer thick passivating layers of aluminum oxide on top of self-assembled organic monolayers with hydrophilic terminal groups. This layer acts as a protective barrier and allows simple vapor deposition of the top electrode without short circuits or molecular damage. This method allows nonshorting molecular junctions of up to 9 mm2 to be easily and reliably fabricated. The effect of passivation on molecular monolayers is studied with Auger and x-ray spectroscopy, while electronic transport measurements confirm molecular tunneling as the transport mechanism for these devices.
©2008 American Institute of Physics
| History: | Received 7 March 2008; accepted 3 April 2008; published 27 May 2008 |
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http://link.aip.org/link/?APPLAB/92/213301/1 |
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0003-6951 (print)
1077-3118 (online)
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