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Two dimensionally patterned GaNxAs1−x/GaAs nanostructures using N+ implantation followed by pulsed laser melting

Appl. Phys. Lett. 93, 102117 (2008); doi:10.1063/1.2982424

Published 12 September 2008

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Taeseok Kim, Michael J. Aziz, and Venkatesh Narayanamurti
Harvard School of Engineering and Applied Sciences, Cambridge, Massachusetts 02138, USA
We present measurements on two dimensionally patterned GaNxAs1−x dots fabricated in a GaAs matrix using ion implantation followed by pulsed laser melting and rapid thermal annealing. The lithographically patterned GaNxAs1−x regions are imaged by ballistic electron emission microscopy (BEEM). By analyzing the BEEM spectra of the locally confined dots, we observe the decrease in the Schottky barrier height with nitrogen incorporation. The second derivatives of BEEM currents from unpatterned GaNxAs1−x films exhibit a decrease in Gamma-like thresholds as the nitrogen concentration increases. The composition dependence of the thresholds agrees well with that of previously studied low temperature molecular beam epitaxy grown alloys. ©2008 American Institute of Physics
History: Received 16 July 2008; accepted 26 August 2008; published 12 September 2008
Permalink: http://link.aip.org/link/?APPLAB/93/102117/1
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KEYWORDS and PACS

Keywords
PACS
  • 61.80.Jh
    Ion radiation effects
  • 68.55.Ln
    Thin film defects and impurities
  • 81.15.Fg
    Laser deposition
  • 81.16.Mk
    Laser-assisted deposition in nanofabrication and processing
  • 81.16.Nd
    Nanolithography in nanofabrication and processing
  • 81.16.Rf
    Nanoscale pattern formation in nanofabrication and processing
  • YEAR: 2008

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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