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Diamondoids as low-kappa dielectric materials

Appl. Phys. Lett. 93, 172901 (2008); doi:10.1063/1.3010379

Published 28 October 2008

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W. A. Clay,1 T. Sasagawa,1,2 M. Kelly,1 J. E. Dahl,3 R. M. K. Carlson,3 N. Melosh,1 and Z.-X. Shen1
1Geballe Laboratory for Advanced Materials, Stanford University, Stanford, California 94305, USA
2Materials and Structures Laboratory, Tokyo Institute of Technology, Nagatsuta, Kanagawa 226-8503, Japan
3MolecularDiamond Technologies, Chevron Technology Ventures, 100 Chevron Way, Richmond, California 94802, USA
The dielectric properties of several diamondoids are investigated in theory and experiment. The dielectric constant (kappa) is experimentally evaluated from cavity microwave measurements, while the theoretical value is obtained from first principles calculations based on the density functional theory. The results show that the diamondoids have low dielectric constants in the range of 2.46–2.68, less than half of that of bulk diamond. Due to their high thermal stability and outstanding mechanical and insulating properties, diamondoids are excellent candidates for low-kappa dielectric applications. ©2008 American Institute of Physics
History: Received 16 June 2008; accepted 9 October 2008; published 28 October 2008
Permalink: http://link.aip.org/link/?APPLAB/93/172901/1
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KEYWORDS and PACS

Keywords
PACS
  • 85.40.-e
    Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology
  • 84.40.Az
    Waveguides, transmission lines, striplines
  • 42.82.Et
    Optical waveguides, couplers, and arrays (integrated optics)
  • 71.15.-m
    Methods of electronic structure calculations (condensed matter)
  • 42.79.Gn
    Optical waveguides and couplers
  • 42.81.Qb
    Fiber waveguides, couplers, and arrays
  • YEAR: 2008

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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REFERENCES (18)
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