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A terraced scanning superconducting quantum interference device susceptometer with submicron pickup loops

Appl. Phys. Lett. 93, 243101 (2008); doi:10.1063/1.3046098

Published 15 December 2008

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Nicholas C. Koshnick,1 Martin E. Huber,2 Julie A. Bert,1 Clifford W. Hicks,1 Jeff Large,3 Hal Edwards,3 and Kathryn A. Moler2
1Departments of Physics and Applied Physics, Stanford University, Stanford, California 94305, USA
2Departments of Physics and Electrical Engineering, University of Colorado Denver, Denver, Colorado 80217, USA
3Circuit Design Repair Laboratory, Texas Instruments, Dallas, Texas 75243, USA

Superconducting quantum interference devices (SQUIDs) can have excellent spin sensitivity depending on their magnetic flux noise, pickup loop diameter, and distance from the sample. We report a family of scanning SQUID susceptometers with terraced tips that position the pickup loops 300  nm from the sample. The 600  nm–2  µm pickup loops, defined by focused ion beam, are integrated into a 12-layer optical lithography process allowing flux-locked feedback, in situ background subtraction and optimized flux noise. These features enable a sensitivity of ~70 electron spins per root hertz at 4  K. ©2008 American Institute of Physics
History: Received 27 August 2008; accepted 21 October 2008; published 15 December 2008
Permalink: http://link.aip.org/link/?APPLAB/93/243101/1
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Supplemental Material

KEYWORDS and PACS

Keywords
PACS
  • 07.55.Jg
    Magnetometers for susceptibility, magnetic moment, and magnetization measurements
  • 85.25.Dq
    Superconducting quantum interference devices (SQUIDs)
  • 06.30.Ka
    Measurement of basic electromagnetic quantities
  • YEAR: 2008

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ISSN:
0003-6951 (print)   1077-3118 (online)
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