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Whispering gallery mode enhanced optical force with resonant tunneling excitation in the Kretschmann geometry
The boundary element method is applied to investigate the optical forces when whispering gallery modes (WGMs) are excited by a total internally reflected wave. Such evanescent wave is particularly eff...

Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography

Appl. Phys. Lett. 94, 011101 (2009); doi:10.1063/1.3036955

Published 5 January 2009

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D. Shir,1 E. C. Nelson,1 Y. C. Chen,1 A. Brzezinski,1 H. Liao,1 P. V. Braun,1,2 P. Wiltzius,1,2 K. H. A. Bogart,3 and J. A. Rogers1,2
1Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA
2Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA
3Sandia National Laboratories, Albuquerque, New Mexico 87123, USA
We describe the fabrication of silicon three dimensional photonic crystals using polymer templates defined by a single step, two-photon exposure through a layer of photopolymer with relief molded on its surface. The resulting crystals exhibit high structural quality over large areas, displaying geometries consistent with calculation. Spectroscopic measurements of transmission and reflection through the silicon and polymer structures reveal excellent optical properties, approaching properties predicted by simulations that assume ideal layouts. ©2009 American Institute of Physics
History: Received 26 August 2008; accepted 5 November 2008; published 5 January 2009
Permalink: http://link.aip.org/link/?APPLAB/94/011101/1
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KEYWORDS and PACS

Keywords
PACS
  • 42.70.Qs
    Photonic bandgap materials
  • 42.70.Jk
    Optical polymers and other organic optical materials
  • 42.82.Cr
    Optical fabrication techniques; lithography, pattern transfer (integrated optics)
  • YEAR: 2008

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PUBLICATION DATA

ISSN:
0003-6951 (print)   1077-3118 (online)
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