Surface leakage reduction in narrow band gap type-II antimonide-based superlattice photodiodes
Appl. Phys. Lett. 94, 053506 (2009); doi:10.1063/1.3078282
Published 3 February 2009
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Inductively coupled plasma (ICP) dry etching rendered structural and electrical enhancements on type-II antimonide-based superlattices compared to those delineated by electron cyclotron resonance (ECR) with a regenerative chemical wet etch. The surface resistivity of 4×105
cm is evidence of the surface quality achieved with ICP etching and polyimide passivation. By only modifying the etching technique in the fabrication steps, the ICP-etched devices with a 9.3 µm cutoff wavelength revealed a diffusion-limited dark current density of 4.1×10−6 A/cm2 and a maximum differential resistance at zero bias in excess of 5300
cm2 at 77 K, which are an order of magnitude better in comparison to the ECR-etched devices.
©2009 American Institute of Physics
cm is evidence of the surface quality achieved with ICP etching and polyimide passivation. By only modifying the etching technique in the fabrication steps, the ICP-etched devices with a 9.3 µm cutoff wavelength revealed a diffusion-limited dark current density of 4.1×10−6 A/cm2 and a maximum differential resistance at zero bias in excess of 5300
cm2 at 77 K, which are an order of magnitude better in comparison to the ECR-etched devices.
©2009 American Institute of Physics
| History: | Received 18 December 2008; accepted 14 January 2009; published 3 February 2009 |
| Permalink: |
http://link.aip.org/link/?APPLAB/94/053506/1 |
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0003-6951 (print)
1077-3118 (online)
REFERENCES (13)
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- B. -M. Nguyen, D. Hoffman, P. -Y. Delaunay, and M. Razeghi, Appl. Phys. Lett. 91, 163511 (2007).
- I. Vurgaftman, E. H. Aifer, C. L. Canedy, J. G. Tischler, J. R. Meyer, J. H. Warner, E. M. Jackson, G. Hildebrandt, and G. J. Sullivan, Appl. Phys. Lett. 89, 121114 (2006).
- B. M. Nguyen, D. Hoffman, E. K. Huang, P. -Y. Delaunay, and M. Razeghi, Appl. Phys. Lett. 93, 123502 (2008).
- A. Hood, P. -Y. Delaunay, D. Hoffman, B. -M. Nguyen, Y. Wei, M. Razeghi, and V. Nathan, Appl. Phys. Lett. 90, 233513 (2007).
- R. Rehm, M. Walther, F. Fuchs, J. Schmitz, and J. Fleissner, Appl. Phys. Lett. 86, 173501 (2005).
- P. Y. Delaunay, B. M. Nguyen, D. Hoffman, and M. Razeghi, “Background limited focal plane array based on InAs/GaSb superlattices M-structure with a 9.6 µm cutoff wavelength,” IEEE J. Quantum Electron. (to be published).
- J. W. Lee, W. T. Lim, I. K. Baek, S. R. Yoo, M. H. Jeon, G. S. Cho, and S. J. Pearton,
J. Electron. Mater. 33, 358 (2004) . - R. Rehm, M. Walther, J. Schmitz, J. Fleißner, F. Fuchs, J. Ziegler, and W. Cabanski,
Proc. SPIE 5957, 595707 (2005) . - A. J. Stoltz, J. B. Varesi, and J. D. Benson,
J. Electron. Mater. 36, 1007 (2007) . - E. K. Huang, B. -M. Nguyen, D. Hoffman, P. -Y. Delaunay, and M. Razeghi, Quantum Sensing and Nanophotonic Devices IV (SPIE, San Jose, CA, 2009).
- L. Bürkle and F. Fuchs, in Handbook for Infrared Technologies, edited by M. Henini and M. Razeghi (Elsevier, New York, 2002), p. 159.
- C. T. Sah, Phys. Rev. 123, 1594 (1961).
- E. P. G. Smith, E. A. Patten, P. M. Goetz, G. M. Venzor, J. A. Roth, B. Z. Nosho, J. D. Benson, A. J. Stoltz, J. B. Varesi, J. E. Jenson, S. M. Johnson, and W. A. Radford,
J. Electron. Mater. 35, 1145 (2006) .







