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Pressure dependent resonant frequency of micromechanical drumhead resonators

Appl. Phys. Lett. 94, 213506 (2009); doi:10.1063/1.3141731

Published 27 May 2009

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D. R. Southworth, H. G. Craighead, and J. M. Parpia
Center for Materials Research, Cornell University, Ithaca, New York 14853, USA
We examine the relationship between squeeze film effects and resonance frequency in drum-type resonators. We find that the resonance frequency increases linearly with pressure as a result of the additional restoring force contribution from compression of gas within the drum cavity. We demonstrate trapping of the gas by squeeze film effects and geometry. The pressure sensitivity is shown to scale inversely with cavity height and sound radiation is found to be the predominant loss mechanism near and above atmospheric pressure. Drum resonators exhibit linearity and sensitivity suitable to barometry from below 10 Torr up to several atmospheres. ©2009 American Institute of Physics
History: Received 20 April 2009; accepted 2 May 2009; published 27 May 2009
Permalink: http://link.aip.org/link/?APPLAB/94/213506/1
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KEYWORDS and PACS

Keywords
PACS
  • 85.85.+j
    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices
  • 06.30.-k
    Measurements common to several branches of physics and astronomy
  • 07.07.Df
    Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
  • 07.10.Cm
    Micromechanical devices and systems
  • YEAR: 2009

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ISSN:
0003-6951 (print)   1077-3118 (online)
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