Growth of high-density vertically aligned arrays of carbon nanotubes by plasma-assisted catalyst pretreatment
Appl. Phys. Lett. 95, 173115 (2009); doi:10.1063/1.3256012
Published 30 October 2009
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A plasma-assisted thermal pretreatment of catalyst films (Ni, Co, or Fe) greatly facilitates the direct growth of high-density vertically aligned arrays of small diameter carbon nanotubes (CNTs) on conductive TiN by purely thermal chemical vapor deposition. Purely thermal catalyst pretreatment gives limited or no growth. The plasma-assisted pretreatment promotes a stronger catalyst-support interaction, which reduces catalyst mobility and hence stabilizes smaller catalyst particles with a higher number density.
©2009 American Institute of Physics
| History: | Received 21 April 2009; accepted 6 October 2009; published 30 October 2009 |
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