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Growth of high-density vertically aligned arrays of carbon nanotubes by plasma-assisted catalyst pretreatment

Appl. Phys. Lett. 95, 173115 (2009); doi:10.1063/1.3256012

Published 30 October 2009

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S. Esconjauregui,1 B. C. Bayer,1 M. Fouquet,1 C. T. Wirth,1 C. Ducati,2 S. Hofmann,1 and J. Robertson1
1Department of Engineering, University of Cambridge, 9 JJ Thomson Avenue, Cambridge CB3 0FA, United Kingdom
2Department of Materials Science and Metallurgy, University of Cambridge, Cambridge CB3 0FA, United Kingdom

A plasma-assisted thermal pretreatment of catalyst films (Ni, Co, or Fe) greatly facilitates the direct growth of high-density vertically aligned arrays of small diameter carbon nanotubes (CNTs) on conductive TiN by purely thermal chemical vapor deposition. Purely thermal catalyst pretreatment gives limited or no growth. The plasma-assisted pretreatment promotes a stronger catalyst-support interaction, which reduces catalyst mobility and hence stabilizes smaller catalyst particles with a higher number density. ©2009 American Institute of Physics
History: Received 21 April 2009; accepted 6 October 2009; published 30 October 2009
Permalink: http://link.aip.org/link/?APPLAB/95/173115/1
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KEYWORDS and PACS

Keywords
PACS
  • 81.07.De
    Nanotubes: fabrication and characterization
  • 81.15.Gh
    Chemical vapor deposition
  • YEAR: 2009

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ISSN:
0003-6951 (print)   1077-3118 (online)
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